Low-temperature bonding technologies realizing high-functional optical microsystems and sensors

Eiji Higurashi, Tadatomo Suga, Renshi Sawada

    Research output: Contribution to journalArticlepeer-review

    Original languageEnglish
    Pages (from-to)719-724
    Number of pages6
    JournalSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
    Volume79
    Issue number8
    DOIs
    Publication statusPublished - Aug 2013

    All Science Journal Classification (ASJC) codes

    • Mechanical Engineering

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