Low temperature crystallization of a-SiGe on insulating films for thin film transistor application

Masanobu Miyao, Hiroshi Kanno, Isao Tsunoda, Taizoh Sadoh

Research output: Contribution to journalConference articlepeer-review

Fingerprint Dive into the research topics of 'Low temperature crystallization of a-SiGe on insulating films for thin film transistor application'. Together they form a unique fingerprint.

Engineering & Materials Science