Low temperature direct bonding of flip-chip mounting VCSEL to Si substrate

T. Imamura, E. Higurashi, T. Suga, Renshi Sawada

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper describes the result of low temperature direct metal bonding of vertical-cavity surface-emitting laser (VCSEL) for flip-chip mounting to Si substrate by surface activated bonding (SAB) method. In the SAB process, radio frequency (RF) driven, low-pressure argon (Ar) plasma was used to clean the surfaces to be bonded. After organic contaminants on the surfaces of Au electrodes of the VCSEL and Si substrate were removed by Ar RF plasma, Au-Au direct bonding was carried out in the ambient air. The high die-shear strength of 84 MPa (77.4 gf) was achieved at a bonding temperature of 150°C. Therefore, Au SAB bonding in the ambient air can be applied to realize low cost and highly functional optical microsystems.

Original languageEnglish
Title of host publication2006 International Microsystems, Packaging,Assembly Conference Taiwan, IMPACT - Proceedings of Technical Papers
Pages185-188
Number of pages4
DOIs
Publication statusPublished - 2006
Event2006 International Microsystems, Packaging, Assembly Conference Taiwan, IMPACT - Taipei, Taiwan, Province of China
Duration: Oct 18 2006Oct 20 2006

Other

Other2006 International Microsystems, Packaging, Assembly Conference Taiwan, IMPACT
CountryTaiwan, Province of China
CityTaipei
Period10/18/0610/20/06

Fingerprint

Surface emitting lasers
Mountings
Substrates
Temperature
Argon
Plasmas
Microsystems
Air
Shear strength
Impurities
Electrodes
Metals
Costs

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Imamura, T., Higurashi, E., Suga, T., & Sawada, R. (2006). Low temperature direct bonding of flip-chip mounting VCSEL to Si substrate. In 2006 International Microsystems, Packaging,Assembly Conference Taiwan, IMPACT - Proceedings of Technical Papers (pp. 185-188). [4107477] https://doi.org/10.1109/IMPACT.2006.312175

Low temperature direct bonding of flip-chip mounting VCSEL to Si substrate. / Imamura, T.; Higurashi, E.; Suga, T.; Sawada, Renshi.

2006 International Microsystems, Packaging,Assembly Conference Taiwan, IMPACT - Proceedings of Technical Papers. 2006. p. 185-188 4107477.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Imamura, T, Higurashi, E, Suga, T & Sawada, R 2006, Low temperature direct bonding of flip-chip mounting VCSEL to Si substrate. in 2006 International Microsystems, Packaging,Assembly Conference Taiwan, IMPACT - Proceedings of Technical Papers., 4107477, pp. 185-188, 2006 International Microsystems, Packaging, Assembly Conference Taiwan, IMPACT, Taipei, Taiwan, Province of China, 10/18/06. https://doi.org/10.1109/IMPACT.2006.312175
Imamura T, Higurashi E, Suga T, Sawada R. Low temperature direct bonding of flip-chip mounting VCSEL to Si substrate. In 2006 International Microsystems, Packaging,Assembly Conference Taiwan, IMPACT - Proceedings of Technical Papers. 2006. p. 185-188. 4107477 https://doi.org/10.1109/IMPACT.2006.312175
Imamura, T. ; Higurashi, E. ; Suga, T. ; Sawada, Renshi. / Low temperature direct bonding of flip-chip mounting VCSEL to Si substrate. 2006 International Microsystems, Packaging,Assembly Conference Taiwan, IMPACT - Proceedings of Technical Papers. 2006. pp. 185-188
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