Low-Temperature Formation of Poly-Si_<1-x>Ge_x (x:0-1) on SiO_2 by Au-Mediated Lateral Crystallization

Hiroshi Kanno, Tomohisa Aoki, Atsushi Kenjo, Taizoh Sadoh, Masanobu Miyao

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)516-517
Number of pages2
JournalExtended abstracts of the ... Conference on Solid State Devices and Materials
Volume2004
Publication statusPublished - Sep 15 2004

Cite this