By reactive pulsed laser deposition under a hydrogen atmosphere, nanocrystalline diamond (NCD) films containing amorphous carbon were grown at a substrate temperature of 550°C. The deposition rate was 80nm/min. The transmission electron microscopy (TEM) observation showed that nonoriented nanocrystalline diamond films, whose crystallite diameters were 10-20nm, were grown at an optimum hydrogen pressure of 4 Torr. The deposited films had smooth surfaces on a nanoscale.
|Journal||Japanese Journal of Applied Physics, Part 2: Letters|
|Issue number||2 B|
|Publication status||Published - Feb 15 2004|
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)
- Physics and Astronomy(all)