Low-Temperature Growth of Thin Silicon Nitride Film by Electron Cyclotron Resonance Plasma Irradiation

Liwei Zhao, Nam Hoai Luu, Dong Wang, Youhei Sugimoto, Ken Ichi Ikeda, Hideheru Nakashima, Hiroshi Nakashima

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy