Low-Temperature Solid-Phase Crystallization of High-Sn Concentration SISn on Insulator

Kota Okamoto; Tomohiro Kosugi; Taizoh Sadoh

Low-Temperature Solid-Phase Crystallization of High-Sn Concentration SISn on Insulator

Kota Okamoto, Tomohiro Kosugi, Taizoh Sadoh

Electronic Devices

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Solid-phase crystallization of high-Sn concentration SiSn films on insulator has been investigated at low-temperatures. It is found that crystallization velocities significantly increase with increasing thickness. The total Sn concentrations in grown films show uniform profiles, which are almost similar to those before annealing. The substitutional Sn concentrations in grown layers significantly exceed the thermal equilibrium solid-solubility of Sn in Ge. These results demonstrate that low-temperature solid-phase crystallization is very useful to realize non-thermal equilibrium states of SiSn films.

Original language	English
Title of host publication	Proceedings of AM-FPD 2021 - 28th International Workshop on Active-Matrix Flatpanel Displays and Devices
Subtitle of host publication	TFT Technologies and FPD Materials
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	116-117
Number of pages	2
ISBN (Electronic)	9784991216909
Publication status	Published - 2021
Event	28th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, AM-FPD 2021 - Virtual, Online, Japan Duration: Jun 29 2021 → Jul 2 2021

Publication series

Name	Proceedings of AM-FPD 2021 - 28th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials

Conference

Conference	28th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, AM-FPD 2021
Country/Territory	Japan
City	Virtual, Online
Period	6/29/21 → 7/2/21

All Science Journal Classification (ASJC) codes

Computer Graphics and Computer-Aided Design
Media Technology
Electronic, Optical and Magnetic Materials
Instrumentation

Cite this

Okamoto, K., Kosugi, T., & Sadoh, T. (2021). Low-Temperature Solid-Phase Crystallization of High-Sn Concentration SISn on Insulator. In Proceedings of AM-FPD 2021 - 28th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials (pp. 116-117). (Proceedings of AM-FPD 2021 - 28th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials). Institute of Electrical and Electronics Engineers Inc..

Low-Temperature Solid-Phase Crystallization of High-Sn Concentration SISn on Insulator. / Okamoto, Kota; Kosugi, Tomohiro; Sadoh, Taizoh.

Proceedings of AM-FPD 2021 - 28th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials. Institute of Electrical and Electronics Engineers Inc., 2021. p. 116-117 (Proceedings of AM-FPD 2021 - 28th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Okamoto, K, Kosugi, T & Sadoh, T 2021, Low-Temperature Solid-Phase Crystallization of High-Sn Concentration SISn on Insulator. in Proceedings of AM-FPD 2021 - 28th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials. Proceedings of AM-FPD 2021 - 28th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, Institute of Electrical and Electronics Engineers Inc., pp. 116-117, 28th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, AM-FPD 2021, Virtual, Online, Japan, 6/29/21.

Okamoto K, Kosugi T, Sadoh T. Low-Temperature Solid-Phase Crystallization of High-Sn Concentration SISn on Insulator. In Proceedings of AM-FPD 2021 - 28th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials. Institute of Electrical and Electronics Engineers Inc. 2021. p. 116-117. (Proceedings of AM-FPD 2021 - 28th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials).

Okamoto, Kota ; Kosugi, Tomohiro ; Sadoh, Taizoh. / Low-Temperature Solid-Phase Crystallization of High-Sn Concentration SISn on Insulator. Proceedings of AM-FPD 2021 - 28th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials. Institute of Electrical and Electronics Engineers Inc., 2021. pp. 116-117 (Proceedings of AM-FPD 2021 - 28th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials).

@inproceedings{a68dbf64632044c58893bb1a89fbc7f5,

title = "Low-Temperature Solid-Phase Crystallization of High-Sn Concentration SISn on Insulator",

abstract = "Solid-phase crystallization of high-Sn concentration SiSn films on insulator has been investigated at low-temperatures. It is found that crystallization velocities significantly increase with increasing thickness. The total Sn concentrations in grown films show uniform profiles, which are almost similar to those before annealing. The substitutional Sn concentrations in grown layers significantly exceed the thermal equilibrium solid-solubility of Sn in Ge. These results demonstrate that low-temperature solid-phase crystallization is very useful to realize non-thermal equilibrium states of SiSn films.",

author = "Kota Okamoto and Tomohiro Kosugi and Taizoh Sadoh",

note = "Publisher Copyright: {\textcopyright} 2021 FTFMD; 28th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, AM-FPD 2021 ; Conference date: 29-06-2021 Through 02-07-2021",

year = "2021",

language = "English",

series = "Proceedings of AM-FPD 2021 - 28th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "116--117",

booktitle = "Proceedings of AM-FPD 2021 - 28th International Workshop on Active-Matrix Flatpanel Displays and Devices",

address = "United States",

}

TY - GEN

T1 - Low-Temperature Solid-Phase Crystallization of High-Sn Concentration SISn on Insulator

AU - Okamoto, Kota

AU - Kosugi, Tomohiro

AU - Sadoh, Taizoh

PY - 2021

Y1 - 2021

N2 - Solid-phase crystallization of high-Sn concentration SiSn films on insulator has been investigated at low-temperatures. It is found that crystallization velocities significantly increase with increasing thickness. The total Sn concentrations in grown films show uniform profiles, which are almost similar to those before annealing. The substitutional Sn concentrations in grown layers significantly exceed the thermal equilibrium solid-solubility of Sn in Ge. These results demonstrate that low-temperature solid-phase crystallization is very useful to realize non-thermal equilibrium states of SiSn films.

AB - Solid-phase crystallization of high-Sn concentration SiSn films on insulator has been investigated at low-temperatures. It is found that crystallization velocities significantly increase with increasing thickness. The total Sn concentrations in grown films show uniform profiles, which are almost similar to those before annealing. The substitutional Sn concentrations in grown layers significantly exceed the thermal equilibrium solid-solubility of Sn in Ge. These results demonstrate that low-temperature solid-phase crystallization is very useful to realize non-thermal equilibrium states of SiSn films.

UR - http://www.scopus.com/inward/record.url?scp=85125798498&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85125798498&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:85125798498

T3 - Proceedings of AM-FPD 2021 - 28th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials

SP - 116

EP - 117

BT - Proceedings of AM-FPD 2021 - 28th International Workshop on Active-Matrix Flatpanel Displays and Devices

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 28th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, AM-FPD 2021

Y2 - 29 June 2021 through 2 July 2021

ER -

Low-Temperature Solid-Phase Crystallization of High-Sn Concentration SISn on Insulator

Abstract

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