Macroscopically and atomically smooth YBa2Cu3O7 film grown by reactive rapid sequential pulse laser deposition

Yukio Watanabe, M. Tanamura, H. Asami, Y. Matsumoto, Y. Seki, S. Matsumoto

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Abstract

A modified version of pulsed laser deposition : Rapid Sequential Pulsed Laser Deposition (RS-PLD) is proposed. The 500 A thick YBa2Cu3O7 (YBCO) films with Tc=80∼90K were grown in-situ by sequentially irradiating metal targets. Typically, no particulates were observed in the surface area of 100 μm by 100 μm. Fittings to the Grazing Incidence X-ray reflectance (GIXR) gave the surface roughness of ±1.5 A for those on MgO and ±9A for those on SrTiO3.

Original languageEnglish
Pages (from-to)579-580
Number of pages2
JournalPhysica C: Superconductivity and its applications
Volume235-240
Issue numberPART 1
DOIs
Publication statusPublished - Jan 1 1994
Externally publishedYes

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Energy Engineering and Power Technology
  • Electrical and Electronic Engineering

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