Macroscopically and atomically smooth YBa2Cu3O7 film grown by reactive rapid sequential pulse laser deposition

Yukio Watanabe, M. Tanamura, H. Asami, Y. Matsumoto, Y. Seki, S. Matsumoto

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


A modified version of pulsed laser deposition : Rapid Sequential Pulsed Laser Deposition (RS-PLD) is proposed. The 500 A thick YBa2Cu3O7 (YBCO) films with Tc=80∼90K were grown in-situ by sequentially irradiating metal targets. Typically, no particulates were observed in the surface area of 100 μm by 100 μm. Fittings to the Grazing Incidence X-ray reflectance (GIXR) gave the surface roughness of ±1.5 A for those on MgO and ±9A for those on SrTiO3.

Original languageEnglish
Pages (from-to)579-580
Number of pages2
JournalPhysica C: Superconductivity and its applications
Issue numberPART 1
Publication statusPublished - Dec 1994
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Energy Engineering and Power Technology
  • Electrical and Electronic Engineering


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