Macroscopically and atomically smooth YBa2Cu3O7 film grown by reactive rapid sequential pulse laser deposition

Yukio Watanabe; M. Tanamura; H. Asami; Y. Matsumoto; Y. Seki; S. Matsumoto

doi:10.1016/0921-4534(94)91513-X

Macroscopically and atomically smooth YBa₂Cu₃O₇ film grown by reactive rapid sequential pulse laser deposition

Yukio Watanabe, M. Tanamura, H. Asami, Y. Matsumoto, Y. Seki, S. Matsumoto

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

A modified version of pulsed laser deposition : Rapid Sequential Pulsed Laser Deposition (RS-PLD) is proposed. The 500 A thick YBa₂Cu₃O₇ (YBCO) films with Tc=80∼90K were grown in-situ by sequentially irradiating metal targets. Typically, no particulates were observed in the surface area of 100 μm by 100 μm. Fittings to the Grazing Incidence X-ray reflectance (GIXR) gave the surface roughness of ±1.5 A for those on MgO and ±9A for those on SrTiO₃.

Original language	English
Pages (from-to)	579-580
Number of pages	2
Journal	Physica C: Superconductivity and its applications
Volume	235-240
Issue number	PART 1
DOIs	https://doi.org/10.1016/0921-4534(94)91513-X
Publication status	Published - Jan 1 1994
Externally published	Yes

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Energy Engineering and Power Technology
Electrical and Electronic Engineering

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10.1016/0921-4534(94)91513-X

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title = "Macroscopically and atomically smooth YBa2Cu3O7 film grown by reactive rapid sequential pulse laser deposition",

abstract = "A modified version of pulsed laser deposition : Rapid Sequential Pulsed Laser Deposition (RS-PLD) is proposed. The 500 A thick YBa2Cu3O7 (YBCO) films with Tc=80∼90K were grown in-situ by sequentially irradiating metal targets. Typically, no particulates were observed in the surface area of 100 μm by 100 μm. Fittings to the Grazing Incidence X-ray reflectance (GIXR) gave the surface roughness of ±1.5 A for those on MgO and ±9A for those on SrTiO3.",

author = "Yukio Watanabe and M. Tanamura and H. Asami and Y. Matsumoto and Y. Seki and S. Matsumoto",

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doi = "10.1016/0921-4534(94)91513-X",

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T1 - Macroscopically and atomically smooth YBa2Cu3O7 film grown by reactive rapid sequential pulse laser deposition

AU - Watanabe, Yukio

AU - Tanamura, M.

AU - Asami, H.

AU - Matsumoto, Y.

AU - Seki, Y.

AU - Matsumoto, S.

PY - 1994/1/1

Y1 - 1994/1/1

N2 - A modified version of pulsed laser deposition : Rapid Sequential Pulsed Laser Deposition (RS-PLD) is proposed. The 500 A thick YBa2Cu3O7 (YBCO) films with Tc=80∼90K were grown in-situ by sequentially irradiating metal targets. Typically, no particulates were observed in the surface area of 100 μm by 100 μm. Fittings to the Grazing Incidence X-ray reflectance (GIXR) gave the surface roughness of ±1.5 A for those on MgO and ±9A for those on SrTiO3.

AB - A modified version of pulsed laser deposition : Rapid Sequential Pulsed Laser Deposition (RS-PLD) is proposed. The 500 A thick YBa2Cu3O7 (YBCO) films with Tc=80∼90K were grown in-situ by sequentially irradiating metal targets. Typically, no particulates were observed in the surface area of 100 μm by 100 μm. Fittings to the Grazing Incidence X-ray reflectance (GIXR) gave the surface roughness of ±1.5 A for those on MgO and ±9A for those on SrTiO3.

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