Macroscopically and atomically smooth YBa2Cu3O7 film grown by reactive rapid sequential pulse laser deposition

Yukio Watanabe; M. Tanamura; H. Asami; Y. Matsumoto; Y. Seki; S. Matsumoto

doi:10.1016/0921-4534(94)91513-X

Macroscopically and atomically smooth YBa₂Cu₃O₇ film grown by reactive rapid sequential pulse laser deposition

Yukio Watanabe, M. Tanamura, H. Asami, Y. Matsumoto, Y. Seki, S. Matsumoto

Research output: Contribution to journal › Article

2 Citations (Scopus)

Abstract

A modified version of pulsed laser deposition : Rapid Sequential Pulsed Laser Deposition (RS-PLD) is proposed. The 500 A thick YBa₂Cu₃O₇ (YBCO) films with Tc=80∼90K were grown in-situ by sequentially irradiating metal targets. Typically, no particulates were observed in the surface area of 100 μm by 100 μm. Fittings to the Grazing Incidence X-ray reflectance (GIXR) gave the surface roughness of ±1.5 A for those on MgO and ±9A for those on SrTiO₃.

Original language	English
Pages (from-to)	579-580
Number of pages	2
Journal	Physica C: Superconductivity and its applications
Volume	235-240
Issue number	PART 1
DOIs	https://doi.org/10.1016/0921-4534(94)91513-X
Publication status	Published - Jan 1 1994
Externally published	Yes

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All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Energy Engineering and Power Technology
Electrical and Electronic Engineering

Cite this

Watanabe, Y., Tanamura, M., Asami, H., Matsumoto, Y., Seki, Y., & Matsumoto, S. (1994). Macroscopically and atomically smooth YBa₂Cu₃O₇ film grown by reactive rapid sequential pulse laser deposition. Physica C: Superconductivity and its applications, 235-240(PART 1), 579-580. https://doi.org/10.1016/0921-4534(94)91513-X

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10.1016/0921-4534(94)91513-X