Magnetic micro actuator using interactive force between magnetic elements

Kenji Hatama, Fujio Tsumori, Yang Xu, Hyungoo Kang, Toshiko Osada, Hideshi Miura

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

In micro electro mechanical system (MEMS) field, there have been used many kinds of actuators. Among them, the magnetic actuator has some advantages. As magnetic micro actuators do not need electric wiring for energy supply, the structure can be simple and be downsized easily. However, the magnetic force would be very small with downsizing, which is the main problem for conventional magnetic actuators. We propose a new type actuator using magnetic interaction force between magnetic elements to solve this matter. This actuator can work even if it gets smaller, because the interaction force is dominant in a microscopic region. We fabricated the actuator by a casting process with photolithography using the SU-8 resist material. Then, the structure was fabricated by casting the mixture of poly(dimethylsiloxane) (PDMS) and a magnetic powder material. The beam type actuator works successfully and also shows interesting behavior. We can control the behavior of this actuator by changing the arrangement of magnetic elements on the structure. We also show theoretical evaluation of the deformation of the present actuator.

Original languageEnglish
Article number06FL14
JournalJapanese journal of applied physics
Volume51
Issue number6 PART 2
DOIs
Publication statusPublished - Jun 1 2012

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Actuators
actuators
Magnetic actuators
Casting
electric wiring
Photolithography
Electric wiring
Polydimethylsiloxane
photolithography
Powders
interactions
evaluation

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Magnetic micro actuator using interactive force between magnetic elements. / Hatama, Kenji; Tsumori, Fujio; Xu, Yang; Kang, Hyungoo; Osada, Toshiko; Miura, Hideshi.

In: Japanese journal of applied physics, Vol. 51, No. 6 PART 2, 06FL14, 01.06.2012.

Research output: Contribution to journalArticle

Hatama, Kenji ; Tsumori, Fujio ; Xu, Yang ; Kang, Hyungoo ; Osada, Toshiko ; Miura, Hideshi. / Magnetic micro actuator using interactive force between magnetic elements. In: Japanese journal of applied physics. 2012 ; Vol. 51, No. 6 PART 2.
@article{4c682e8cb9114d29a820cbc8802740cd,
title = "Magnetic micro actuator using interactive force between magnetic elements",
abstract = "In micro electro mechanical system (MEMS) field, there have been used many kinds of actuators. Among them, the magnetic actuator has some advantages. As magnetic micro actuators do not need electric wiring for energy supply, the structure can be simple and be downsized easily. However, the magnetic force would be very small with downsizing, which is the main problem for conventional magnetic actuators. We propose a new type actuator using magnetic interaction force between magnetic elements to solve this matter. This actuator can work even if it gets smaller, because the interaction force is dominant in a microscopic region. We fabricated the actuator by a casting process with photolithography using the SU-8 resist material. Then, the structure was fabricated by casting the mixture of poly(dimethylsiloxane) (PDMS) and a magnetic powder material. The beam type actuator works successfully and also shows interesting behavior. We can control the behavior of this actuator by changing the arrangement of magnetic elements on the structure. We also show theoretical evaluation of the deformation of the present actuator.",
author = "Kenji Hatama and Fujio Tsumori and Yang Xu and Hyungoo Kang and Toshiko Osada and Hideshi Miura",
year = "2012",
month = "6",
day = "1",
doi = "10.1143/JJAP.51.06FL14",
language = "English",
volume = "51",
journal = "Japanese Journal of Applied Physics",
issn = "0021-4922",
number = "6 PART 2",

}

TY - JOUR

T1 - Magnetic micro actuator using interactive force between magnetic elements

AU - Hatama, Kenji

AU - Tsumori, Fujio

AU - Xu, Yang

AU - Kang, Hyungoo

AU - Osada, Toshiko

AU - Miura, Hideshi

PY - 2012/6/1

Y1 - 2012/6/1

N2 - In micro electro mechanical system (MEMS) field, there have been used many kinds of actuators. Among them, the magnetic actuator has some advantages. As magnetic micro actuators do not need electric wiring for energy supply, the structure can be simple and be downsized easily. However, the magnetic force would be very small with downsizing, which is the main problem for conventional magnetic actuators. We propose a new type actuator using magnetic interaction force between magnetic elements to solve this matter. This actuator can work even if it gets smaller, because the interaction force is dominant in a microscopic region. We fabricated the actuator by a casting process with photolithography using the SU-8 resist material. Then, the structure was fabricated by casting the mixture of poly(dimethylsiloxane) (PDMS) and a magnetic powder material. The beam type actuator works successfully and also shows interesting behavior. We can control the behavior of this actuator by changing the arrangement of magnetic elements on the structure. We also show theoretical evaluation of the deformation of the present actuator.

AB - In micro electro mechanical system (MEMS) field, there have been used many kinds of actuators. Among them, the magnetic actuator has some advantages. As magnetic micro actuators do not need electric wiring for energy supply, the structure can be simple and be downsized easily. However, the magnetic force would be very small with downsizing, which is the main problem for conventional magnetic actuators. We propose a new type actuator using magnetic interaction force between magnetic elements to solve this matter. This actuator can work even if it gets smaller, because the interaction force is dominant in a microscopic region. We fabricated the actuator by a casting process with photolithography using the SU-8 resist material. Then, the structure was fabricated by casting the mixture of poly(dimethylsiloxane) (PDMS) and a magnetic powder material. The beam type actuator works successfully and also shows interesting behavior. We can control the behavior of this actuator by changing the arrangement of magnetic elements on the structure. We also show theoretical evaluation of the deformation of the present actuator.

UR - http://www.scopus.com/inward/record.url?scp=84863301858&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84863301858&partnerID=8YFLogxK

U2 - 10.1143/JJAP.51.06FL14

DO - 10.1143/JJAP.51.06FL14

M3 - Article

AN - SCOPUS:84863301858

VL - 51

JO - Japanese Journal of Applied Physics

JF - Japanese Journal of Applied Physics

SN - 0021-4922

IS - 6 PART 2

M1 - 06FL14

ER -