Magneto-FEM analysis for micro actuator using array of magnetic elements

Fujio Tsumori, Kenji Hatama, Hyungoo Kang, Toshiko Osada, Hideshi Miura

Research output: Chapter in Book/Report/Conference proceedingConference contribution

11 Citations (Scopus)

Abstract

This paper reports a magnetic actuator using interaction between micro magnetic elements. It was already reported that the present actuator can work even if the structure was miniaturized to nano-scale. In the present work, simple fabrication process with photolithography and PDMS casting was employed to obtain beam type structures with micro array of magnetic elements on their surface. Two samples with simple grid patterns were prepared for testing. These samples had the same grid pattern but different orientation, which caused directly opposite bending deformation under the same applied magnetic field. We used magneto finite element method (FEM) to explain the behavior of the present actuators.

Original languageEnglish
Title of host publication8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
Pages845-848
Number of pages4
DOIs
Publication statusPublished - Sep 2 2013
Event8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 - Suzhou, China
Duration: Apr 7 2013Apr 10 2013

Publication series

Name8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013

Other

Other8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
CountryChina
CitySuzhou
Period4/7/134/10/13

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All Science Journal Classification (ASJC) codes

  • Biochemistry, Genetics and Molecular Biology (miscellaneous)
  • Biotechnology

Cite this

Tsumori, F., Hatama, K., Kang, H., Osada, T., & Miura, H. (2013). Magneto-FEM analysis for micro actuator using array of magnetic elements. In 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 (pp. 845-848). [6559857] (8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013). https://doi.org/10.1109/NEMS.2013.6559857