Magneto-FEM analysis for micro actuator using array of magnetic elements

Fujio Tsumori; Kenji Hatama; Hyungoo Kang; Toshiko Osada; Hideshi Miura

doi:10.1109/NEMS.2013.6559857

Magneto-FEM analysis for micro actuator using array of magnetic elements

Fujio Tsumori, Kenji Hatama, Hyungoo Kang, Toshiko Osada, Hideshi Miura

Manufacturing Process

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

18 Citations (Scopus)

Abstract

This paper reports a magnetic actuator using interaction between micro magnetic elements. It was already reported that the present actuator can work even if the structure was miniaturized to nano-scale. In the present work, simple fabrication process with photolithography and PDMS casting was employed to obtain beam type structures with micro array of magnetic elements on their surface. Two samples with simple grid patterns were prepared for testing. These samples had the same grid pattern but different orientation, which caused directly opposite bending deformation under the same applied magnetic field. We used magneto finite element method (FEM) to explain the behavior of the present actuators.

Original language	English
Title of host publication	8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
Pages	845-848
Number of pages	4
DOIs	https://doi.org/10.1109/NEMS.2013.6559857
Publication status	Published - Sept 2 2013
Event	8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 - Suzhou, China Duration: Apr 7 2013 → Apr 10 2013

Publication series

Name	8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013

Other

Other	8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
Country/Territory	China
City	Suzhou
Period	4/7/13 → 4/10/13

All Science Journal Classification (ASJC) codes

Biochemistry, Genetics and Molecular Biology (miscellaneous)
Biotechnology

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10.1109/NEMS.2013.6559857

Cite this

Tsumori, F., Hatama, K., Kang, H., Osada, T., & Miura, H. (2013). Magneto-FEM analysis for micro actuator using array of magnetic elements. In 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 (pp. 845-848). [6559857] (8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013). https://doi.org/10.1109/NEMS.2013.6559857

Magneto-FEM analysis for micro actuator using array of magnetic elements. / Tsumori, Fujio; Hatama, Kenji; Kang, Hyungoo et al.
8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013. 2013. p. 845-848 6559857 (8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Tsumori, F, Hatama, K, Kang, H, Osada, T & Miura, H 2013, Magneto-FEM analysis for micro actuator using array of magnetic elements. in 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013., 6559857, 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013, pp. 845-848, 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013, Suzhou, China, 4/7/13. https://doi.org/10.1109/NEMS.2013.6559857

Tsumori F, Hatama K, Kang H, Osada T, Miura H. Magneto-FEM analysis for micro actuator using array of magnetic elements. In 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013. 2013. p. 845-848. 6559857. (8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013). doi: 10.1109/NEMS.2013.6559857

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Magneto-FEM analysis for micro actuator using array of magnetic elements

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