Mass spectrometric investigation of high-mass neutral species in the downstream region of Ar/CH4 plasmas

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Abstract

Mass analysis was carried out on neutral species in the downstream region of Ar/CH4 plasmas. The ionization of the neutral species by Li + attachment, which can inhibit the fragmentation accompanied by ionization in most cases, successfully led to the observation of high-mass neutral hydrocarbons containing up to twenty-seven carbon atoms. Pure Ar and Ar/H2 plasmas were also used to investigate the influence of sputtering of an amorphous hydrocarbon (a-C:H) film deposited during the generation of the Ar/CH4 plasmas. In addition, time dependence of intensity in several neutral species accompanied by the growth of the a-C:H film and its CH4 partial pressure dependence were observed for the first time. On the basis of the present experimental results, the desorption of high-mass neutral molecules from the film to the gas phase is concluded.

Original languageEnglish
Article number013304
JournalJournal of Applied Physics
Volume110
Issue number1
DOIs
Publication statusPublished - Jul 1 2011

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hydrocarbons
ionization
pressure dependence
time dependence
attachment
partial pressure
fragmentation
sputtering
desorption
vapor phases
carbon
atoms
molecules

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

Cite this

Mass spectrometric investigation of high-mass neutral species in the downstream region of Ar/CH4 plasmas. / Furuya, Kenji; Ide, Akihiro; Harata, Akira.

In: Journal of Applied Physics, Vol. 110, No. 1, 013304, 01.07.2011.

Research output: Contribution to journalArticle

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