Measurement of Axial Position of a Microsphere Using Chromatic Confocal System for Probe System Based on the Laser Trapping with the Standing Wave Scale

Shin Ichi Ueda, Masaki Michihata, Terutake Hayashi, Yasuhiro Takaya

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We have proposed surface scanning measurement based on the laser trapping based probe with the standing wave scale (SWS). A scale resolution of SWS is subject to the wavelength of laser and of the hundred nm order, so the interpolation of the SWS is required. The microsphere used for probe, which is the sensor to read the SWS, is located where the forces by the laser trapping and by the standing wave field are balanced, so that the microsphere position depends on the displacement of the sample. For the interpolation of the SWS, axial position of the microsphere must be measured with high accuracy and high resolution. In this report, chromatic confocal system is proposed. As a result the measuring range and the resolution are achieved 5 μm and 10 nm, respectively.

Original languageEnglish
Title of host publication2014 International Symposium on Optomechatronic Technologies, ISOT 2014
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages223-227
Number of pages5
ISBN (Electronic)9781467367523
DOIs
Publication statusPublished - 2014
Event2014 International Symposium on Optomechatronic Technologies, ISOT 2014 - Seattle, United States
Duration: Nov 5 2014Nov 7 2014

Other

Other2014 International Symposium on Optomechatronic Technologies, ISOT 2014
CountryUnited States
CitySeattle
Period11/5/1411/7/14

Fingerprint

Microspheres
Lasers
Interpolation
Scanning
Wavelength
Sensors

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Ueda, S. I., Michihata, M., Hayashi, T., & Takaya, Y. (2014). Measurement of Axial Position of a Microsphere Using Chromatic Confocal System for Probe System Based on the Laser Trapping with the Standing Wave Scale. In 2014 International Symposium on Optomechatronic Technologies, ISOT 2014 (pp. 223-227). [7119424] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ISOT.2014.60

Measurement of Axial Position of a Microsphere Using Chromatic Confocal System for Probe System Based on the Laser Trapping with the Standing Wave Scale. / Ueda, Shin Ichi; Michihata, Masaki; Hayashi, Terutake; Takaya, Yasuhiro.

2014 International Symposium on Optomechatronic Technologies, ISOT 2014. Institute of Electrical and Electronics Engineers Inc., 2014. p. 223-227 7119424.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ueda, SI, Michihata, M, Hayashi, T & Takaya, Y 2014, Measurement of Axial Position of a Microsphere Using Chromatic Confocal System for Probe System Based on the Laser Trapping with the Standing Wave Scale. in 2014 International Symposium on Optomechatronic Technologies, ISOT 2014., 7119424, Institute of Electrical and Electronics Engineers Inc., pp. 223-227, 2014 International Symposium on Optomechatronic Technologies, ISOT 2014, Seattle, United States, 11/5/14. https://doi.org/10.1109/ISOT.2014.60
Ueda SI, Michihata M, Hayashi T, Takaya Y. Measurement of Axial Position of a Microsphere Using Chromatic Confocal System for Probe System Based on the Laser Trapping with the Standing Wave Scale. In 2014 International Symposium on Optomechatronic Technologies, ISOT 2014. Institute of Electrical and Electronics Engineers Inc. 2014. p. 223-227. 7119424 https://doi.org/10.1109/ISOT.2014.60
Ueda, Shin Ichi ; Michihata, Masaki ; Hayashi, Terutake ; Takaya, Yasuhiro. / Measurement of Axial Position of a Microsphere Using Chromatic Confocal System for Probe System Based on the Laser Trapping with the Standing Wave Scale. 2014 International Symposium on Optomechatronic Technologies, ISOT 2014. Institute of Electrical and Electronics Engineers Inc., 2014. pp. 223-227
@inproceedings{1848139941fe41d0b2f220b4f4dee6b5,
title = "Measurement of Axial Position of a Microsphere Using Chromatic Confocal System for Probe System Based on the Laser Trapping with the Standing Wave Scale",
abstract = "We have proposed surface scanning measurement based on the laser trapping based probe with the standing wave scale (SWS). A scale resolution of SWS is subject to the wavelength of laser and of the hundred nm order, so the interpolation of the SWS is required. The microsphere used for probe, which is the sensor to read the SWS, is located where the forces by the laser trapping and by the standing wave field are balanced, so that the microsphere position depends on the displacement of the sample. For the interpolation of the SWS, axial position of the microsphere must be measured with high accuracy and high resolution. In this report, chromatic confocal system is proposed. As a result the measuring range and the resolution are achieved 5 μm and 10 nm, respectively.",
author = "Ueda, {Shin Ichi} and Masaki Michihata and Terutake Hayashi and Yasuhiro Takaya",
year = "2014",
doi = "10.1109/ISOT.2014.60",
language = "English",
pages = "223--227",
booktitle = "2014 International Symposium on Optomechatronic Technologies, ISOT 2014",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
address = "United States",

}

TY - GEN

T1 - Measurement of Axial Position of a Microsphere Using Chromatic Confocal System for Probe System Based on the Laser Trapping with the Standing Wave Scale

AU - Ueda, Shin Ichi

AU - Michihata, Masaki

AU - Hayashi, Terutake

AU - Takaya, Yasuhiro

PY - 2014

Y1 - 2014

N2 - We have proposed surface scanning measurement based on the laser trapping based probe with the standing wave scale (SWS). A scale resolution of SWS is subject to the wavelength of laser and of the hundred nm order, so the interpolation of the SWS is required. The microsphere used for probe, which is the sensor to read the SWS, is located where the forces by the laser trapping and by the standing wave field are balanced, so that the microsphere position depends on the displacement of the sample. For the interpolation of the SWS, axial position of the microsphere must be measured with high accuracy and high resolution. In this report, chromatic confocal system is proposed. As a result the measuring range and the resolution are achieved 5 μm and 10 nm, respectively.

AB - We have proposed surface scanning measurement based on the laser trapping based probe with the standing wave scale (SWS). A scale resolution of SWS is subject to the wavelength of laser and of the hundred nm order, so the interpolation of the SWS is required. The microsphere used for probe, which is the sensor to read the SWS, is located where the forces by the laser trapping and by the standing wave field are balanced, so that the microsphere position depends on the displacement of the sample. For the interpolation of the SWS, axial position of the microsphere must be measured with high accuracy and high resolution. In this report, chromatic confocal system is proposed. As a result the measuring range and the resolution are achieved 5 μm and 10 nm, respectively.

UR - http://www.scopus.com/inward/record.url?scp=84988299852&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84988299852&partnerID=8YFLogxK

U2 - 10.1109/ISOT.2014.60

DO - 10.1109/ISOT.2014.60

M3 - Conference contribution

SP - 223

EP - 227

BT - 2014 International Symposium on Optomechatronic Technologies, ISOT 2014

PB - Institute of Electrical and Electronics Engineers Inc.

ER -