Abstract
We have proposed surface scanning measurement based on the laser trapping based probe with the standing wave scale (SWS). A scale resolution of SWS is subject to the wavelength of laser and of the hundred nm order, so the interpolation of the SWS is required. The microsphere used for probe, which is the sensor to read the SWS, is located where the forces by the laser trapping and by the standing wave field are balanced, so that the microsphere position depends on the displacement of the sample. For the interpolation of the SWS, axial position of the microsphere must be measured with high accuracy and high resolution. In this report, chromatic confocal system is proposed. As a result the measuring range and the resolution are achieved 5 μm and 10 nm, respectively.
| Original language | English |
|---|---|
| Title of host publication | 2014 International Symposium on Optomechatronic Technologies, ISOT 2014 |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | 223-227 |
| Number of pages | 5 |
| ISBN (Electronic) | 9781467367523 |
| DOIs | |
| Publication status | Published - 2014 |
| Event | 2014 International Symposium on Optomechatronic Technologies, ISOT 2014 - Seattle, United States Duration: Nov 5 2014 → Nov 7 2014 |
Other
| Other | 2014 International Symposium on Optomechatronic Technologies, ISOT 2014 |
|---|---|
| Country | United States |
| City | Seattle |
| Period | 11/5/14 → 11/7/14 |
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All Science Journal Classification (ASJC) codes
- Mechanical Engineering
- Electrical and Electronic Engineering
Cite this
Measurement of Axial Position of a Microsphere Using Chromatic Confocal System for Probe System Based on the Laser Trapping with the Standing Wave Scale. / Ueda, Shin Ichi; Michihata, Masaki; Hayashi, Terutake; Takaya, Yasuhiro.
2014 International Symposium on Optomechatronic Technologies, ISOT 2014. Institute of Electrical and Electronics Engineers Inc., 2014. p. 223-227 7119424.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Measurement of Axial Position of a Microsphere Using Chromatic Confocal System for Probe System Based on the Laser Trapping with the Standing Wave Scale
AU - Ueda, Shin Ichi
AU - Michihata, Masaki
AU - Hayashi, Terutake
AU - Takaya, Yasuhiro
PY - 2014
Y1 - 2014
N2 - We have proposed surface scanning measurement based on the laser trapping based probe with the standing wave scale (SWS). A scale resolution of SWS is subject to the wavelength of laser and of the hundred nm order, so the interpolation of the SWS is required. The microsphere used for probe, which is the sensor to read the SWS, is located where the forces by the laser trapping and by the standing wave field are balanced, so that the microsphere position depends on the displacement of the sample. For the interpolation of the SWS, axial position of the microsphere must be measured with high accuracy and high resolution. In this report, chromatic confocal system is proposed. As a result the measuring range and the resolution are achieved 5 μm and 10 nm, respectively.
AB - We have proposed surface scanning measurement based on the laser trapping based probe with the standing wave scale (SWS). A scale resolution of SWS is subject to the wavelength of laser and of the hundred nm order, so the interpolation of the SWS is required. The microsphere used for probe, which is the sensor to read the SWS, is located where the forces by the laser trapping and by the standing wave field are balanced, so that the microsphere position depends on the displacement of the sample. For the interpolation of the SWS, axial position of the microsphere must be measured with high accuracy and high resolution. In this report, chromatic confocal system is proposed. As a result the measuring range and the resolution are achieved 5 μm and 10 nm, respectively.
UR - http://www.scopus.com/inward/record.url?scp=84988299852&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84988299852&partnerID=8YFLogxK
U2 - 10.1109/ISOT.2014.60
DO - 10.1109/ISOT.2014.60
M3 - Conference contribution
SP - 223
EP - 227
BT - 2014 International Symposium on Optomechatronic Technologies, ISOT 2014
PB - Institute of Electrical and Electronics Engineers Inc.
ER -