TY - JOUR
T1 - Measurement of fluid thermal conductivity using a micro-beam MEMS sensor
AU - Takamatsu, Hiroshi
AU - Wang, Haidong
AU - Fukunaga, Takanobu
AU - Kurata, Kosaku
N1 - Funding Information:
This study was supported by the JSPS KAKENHI (Nos. 20656039, 22246026). The authors thank many former graduate students in Department of Mechanical Engineering, Kyushu University, i.e. Mr. Toshiyuki Tanaka, Mr. Yusaku Furuya, Mr. Yuuki Tanaka, Mr. Masataka Shioiri, Mr. Kosuke Hisada, and Mr. Kento Inui for their effort to solve many problems during development of the sensor and methodology to obtain successful results.
PY - 2018
Y1 - 2018
N2 - A new method for measuring thermal conductivities of gases and liquids was established by demonstrating the measurement of five kinds of liquid and air. It uses a sensor named “micro-beam sensor” that is a ∼10-μm-long free-standing platinum membrane suspended across a trench on a silicon substrate and heated in a sample by DC. This method is unique in that it is a steady-state measurement but free from the effect of natural convection owing to the micrometer size of the sensor. Improving the method for precisely determining the temperature of the sensor and modifying the device from those used in our previous feasibility study, we successfully measured the thermal conductivity ranging from ∼0.03 to ∼0.6 W/(m⋅K) within 4% error.
AB - A new method for measuring thermal conductivities of gases and liquids was established by demonstrating the measurement of five kinds of liquid and air. It uses a sensor named “micro-beam sensor” that is a ∼10-μm-long free-standing platinum membrane suspended across a trench on a silicon substrate and heated in a sample by DC. This method is unique in that it is a steady-state measurement but free from the effect of natural convection owing to the micrometer size of the sensor. Improving the method for precisely determining the temperature of the sensor and modifying the device from those used in our previous feasibility study, we successfully measured the thermal conductivity ranging from ∼0.03 to ∼0.6 W/(m⋅K) within 4% error.
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U2 - 10.1016/j.ijheatmasstransfer.2017.09.117
DO - 10.1016/j.ijheatmasstransfer.2017.09.117
M3 - Article
AN - SCOPUS:85030723080
SN - 0017-9310
VL - 117
SP - 30
EP - 35
JO - International Journal of Heat and Mass Transfer
JF - International Journal of Heat and Mass Transfer
ER -