Measurement of neutral flow velocity in an ECR plasma using tunable diode laser LIF spectroscopy combined with saturated absorption spectroscopy

M. Aramaki, K. Ogiwara, S. Etoh, S. Yoshimura, Masayoshi Tanaka

    Research output: Contribution to journalArticle

    2 Citations (Scopus)

    Abstract

    The radial flow of neutral particles in an electron-cyclotron-resonance (ECR) argon plasma has been measured by using a newly developed high resolution laser induced fluorescence (LIF) measurement system. The flow velocity is determined by the Doppler shift of the LIF spectrum. A very high accuracy calibration of an excitation laser has been achieved by installing a saturated absorption spectroscopy unit into the LIF system. We utilized the Lamb dip, which is obtained by the saturated absorption spectroscopy, as a frequency standard for the determination of the flow velocity. The use of Lamb dip is particularly appropriate for the flow velocity measurement, since the position of Lamb dip in the frequency scale is Doppler-shift free and is not disturbed by the motion of reference medium. By utilizing the Lamb dip as the frequency standard, the reliability and stability of the laser frequency calibration is increased. From the radial measurements of LIF spectra of metastable argon atoms at the microwave power of 250 W and 5 kW, it is found that there exists an inward flow of neutral particles in the both plasmas. Both of the radial flow velocity profiles peak around 4 cm from the center, which is comparable with the radius of the boundary of the E×B rotation and anti-E×B rotation in the 5 kW discharge. The maximum flow velocity increases with the microwave power.

    Original languageEnglish
    Article number012008
    JournalJournal of Physics: Conference Series
    Volume227
    DOIs
    Publication statusPublished - Jan 1 2010

    Fingerprint

    electron cyclotron resonance
    laser induced fluorescence
    absorption spectroscopy
    flow velocity
    semiconductor lasers
    radial flow
    frequency standards
    spectroscopy
    neutral particles
    microwaves
    shift
    argon plasma
    velocity measurement
    radial velocity
    installing
    lasers
    velocity distribution
    argon
    radii
    high resolution

    All Science Journal Classification (ASJC) codes

    • Physics and Astronomy(all)

    Cite this

    Measurement of neutral flow velocity in an ECR plasma using tunable diode laser LIF spectroscopy combined with saturated absorption spectroscopy. / Aramaki, M.; Ogiwara, K.; Etoh, S.; Yoshimura, S.; Tanaka, Masayoshi.

    In: Journal of Physics: Conference Series, Vol. 227, 012008, 01.01.2010.

    Research output: Contribution to journalArticle

    @article{004c6a54cafc43119ea4cdf0a0ebc09d,
    title = "Measurement of neutral flow velocity in an ECR plasma using tunable diode laser LIF spectroscopy combined with saturated absorption spectroscopy",
    abstract = "The radial flow of neutral particles in an electron-cyclotron-resonance (ECR) argon plasma has been measured by using a newly developed high resolution laser induced fluorescence (LIF) measurement system. The flow velocity is determined by the Doppler shift of the LIF spectrum. A very high accuracy calibration of an excitation laser has been achieved by installing a saturated absorption spectroscopy unit into the LIF system. We utilized the Lamb dip, which is obtained by the saturated absorption spectroscopy, as a frequency standard for the determination of the flow velocity. The use of Lamb dip is particularly appropriate for the flow velocity measurement, since the position of Lamb dip in the frequency scale is Doppler-shift free and is not disturbed by the motion of reference medium. By utilizing the Lamb dip as the frequency standard, the reliability and stability of the laser frequency calibration is increased. From the radial measurements of LIF spectra of metastable argon atoms at the microwave power of 250 W and 5 kW, it is found that there exists an inward flow of neutral particles in the both plasmas. Both of the radial flow velocity profiles peak around 4 cm from the center, which is comparable with the radius of the boundary of the E×B rotation and anti-E×B rotation in the 5 kW discharge. The maximum flow velocity increases with the microwave power.",
    author = "M. Aramaki and K. Ogiwara and S. Etoh and S. Yoshimura and Masayoshi Tanaka",
    year = "2010",
    month = "1",
    day = "1",
    doi = "10.1088/1742-6596/227/1/012008",
    language = "English",
    volume = "227",
    journal = "Journal of Physics: Conference Series",
    issn = "1742-6588",
    publisher = "IOP Publishing Ltd.",

    }

    TY - JOUR

    T1 - Measurement of neutral flow velocity in an ECR plasma using tunable diode laser LIF spectroscopy combined with saturated absorption spectroscopy

    AU - Aramaki, M.

    AU - Ogiwara, K.

    AU - Etoh, S.

    AU - Yoshimura, S.

    AU - Tanaka, Masayoshi

    PY - 2010/1/1

    Y1 - 2010/1/1

    N2 - The radial flow of neutral particles in an electron-cyclotron-resonance (ECR) argon plasma has been measured by using a newly developed high resolution laser induced fluorescence (LIF) measurement system. The flow velocity is determined by the Doppler shift of the LIF spectrum. A very high accuracy calibration of an excitation laser has been achieved by installing a saturated absorption spectroscopy unit into the LIF system. We utilized the Lamb dip, which is obtained by the saturated absorption spectroscopy, as a frequency standard for the determination of the flow velocity. The use of Lamb dip is particularly appropriate for the flow velocity measurement, since the position of Lamb dip in the frequency scale is Doppler-shift free and is not disturbed by the motion of reference medium. By utilizing the Lamb dip as the frequency standard, the reliability and stability of the laser frequency calibration is increased. From the radial measurements of LIF spectra of metastable argon atoms at the microwave power of 250 W and 5 kW, it is found that there exists an inward flow of neutral particles in the both plasmas. Both of the radial flow velocity profiles peak around 4 cm from the center, which is comparable with the radius of the boundary of the E×B rotation and anti-E×B rotation in the 5 kW discharge. The maximum flow velocity increases with the microwave power.

    AB - The radial flow of neutral particles in an electron-cyclotron-resonance (ECR) argon plasma has been measured by using a newly developed high resolution laser induced fluorescence (LIF) measurement system. The flow velocity is determined by the Doppler shift of the LIF spectrum. A very high accuracy calibration of an excitation laser has been achieved by installing a saturated absorption spectroscopy unit into the LIF system. We utilized the Lamb dip, which is obtained by the saturated absorption spectroscopy, as a frequency standard for the determination of the flow velocity. The use of Lamb dip is particularly appropriate for the flow velocity measurement, since the position of Lamb dip in the frequency scale is Doppler-shift free and is not disturbed by the motion of reference medium. By utilizing the Lamb dip as the frequency standard, the reliability and stability of the laser frequency calibration is increased. From the radial measurements of LIF spectra of metastable argon atoms at the microwave power of 250 W and 5 kW, it is found that there exists an inward flow of neutral particles in the both plasmas. Both of the radial flow velocity profiles peak around 4 cm from the center, which is comparable with the radius of the boundary of the E×B rotation and anti-E×B rotation in the 5 kW discharge. The maximum flow velocity increases with the microwave power.

    UR - http://www.scopus.com/inward/record.url?scp=78651071903&partnerID=8YFLogxK

    UR - http://www.scopus.com/inward/citedby.url?scp=78651071903&partnerID=8YFLogxK

    U2 - 10.1088/1742-6596/227/1/012008

    DO - 10.1088/1742-6596/227/1/012008

    M3 - Article

    AN - SCOPUS:78651071903

    VL - 227

    JO - Journal of Physics: Conference Series

    JF - Journal of Physics: Conference Series

    SN - 1742-6588

    M1 - 012008

    ER -