The electron energy distribution function (EEDF) in an argon planar inductively coupled plasma was measured by the method of laser Thomson scattering. In a low-pressure discharge, a clear departure from a Maxwellian distribution function was observed; an unambiguous measurement of a non-Maxwellian distribution in a low-density glow discharge. The non-Maxwellian EEDF became Maxwellian in a higher pressure discharge. These observations were attributed to the lack of randomizing collisions in the low-pressure discharge and the increase in the number of these collisions at higher pressure.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)