Measurement of non-Maxwellian electron energy distributions in an inductively coupled plasma

T. Hori, M. D. Bowden, K. Uchino, K. Muraoka

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Abstract

The electron energy distribution function (EEDF) in an argon planar inductively coupled plasma was measured by the method of laser Thomson scattering. In a low-pressure discharge, a clear departure from a Maxwellian distribution function was observed; an unambiguous measurement of a non-Maxwellian distribution in a low-density glow discharge. The non-Maxwellian EEDF became Maxwellian in a higher pressure discharge. These observations were attributed to the lack of randomizing collisions in the low-pressure discharge and the increase in the number of these collisions at higher pressure.

Original languageEnglish
Pages (from-to)3683-3685
Number of pages3
JournalApplied Physics Letters
Volume69
Issue number24
DOIs
Publication statusPublished - Dec 9 1996

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All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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