Measurement of preferential sputtering of iron-oxides using laser fluorescence spectroscopy

Yoshinobu Matsuda, Kouji Yamaguchi, Kiyoyuki Suenaga, Yukihiko Yamagata, Chikahisa Honda, Mitsuo Maeda, Yasunori Yamamura, Katsunori Yamamura, Masanori Akazaki

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

Laser fluorescence spectroscopy was used to obtain the velocity-distribution function of sputtered iron from iron oxides, and the fitting of the obtained profiles with the Thompson formula yielded the preferential sputtering of oxygen from iron oxides quantitatively.

Original languageEnglish
Pages (from-to)L2022-L2024
JournalJapanese Journal of Applied Physics
Volume27
Issue number11 A
DOIs
Publication statusPublished - 1988

Fingerprint

Laser spectroscopy
Fluorescence spectroscopy
Iron oxides
iron oxides
Sputtering
sputtering
fluorescence
Velocity distribution
spectroscopy
lasers
Distribution functions
velocity distribution
distribution functions
Iron
iron
Oxygen
oxygen
profiles

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Measurement of preferential sputtering of iron-oxides using laser fluorescence spectroscopy. / Matsuda, Yoshinobu; Yamaguchi, Kouji; Suenaga, Kiyoyuki; Yamagata, Yukihiko; Honda, Chikahisa; Maeda, Mitsuo; Yamamura, Yasunori; Yamamura, Katsunori; Akazaki, Masanori.

In: Japanese Journal of Applied Physics, Vol. 27, No. 11 A, 1988, p. L2022-L2024.

Research output: Contribution to journalArticle

Matsuda, Y, Yamaguchi, K, Suenaga, K, Yamagata, Y, Honda, C, Maeda, M, Yamamura, Y, Yamamura, K & Akazaki, M 1988, 'Measurement of preferential sputtering of iron-oxides using laser fluorescence spectroscopy', Japanese Journal of Applied Physics, vol. 27, no. 11 A, pp. L2022-L2024. https://doi.org/10.1143/JJAP.27.L2022
Matsuda, Yoshinobu ; Yamaguchi, Kouji ; Suenaga, Kiyoyuki ; Yamagata, Yukihiko ; Honda, Chikahisa ; Maeda, Mitsuo ; Yamamura, Yasunori ; Yamamura, Katsunori ; Akazaki, Masanori. / Measurement of preferential sputtering of iron-oxides using laser fluorescence spectroscopy. In: Japanese Journal of Applied Physics. 1988 ; Vol. 27, No. 11 A. pp. L2022-L2024.
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author = "Yoshinobu Matsuda and Kouji Yamaguchi and Kiyoyuki Suenaga and Yukihiko Yamagata and Chikahisa Honda and Mitsuo Maeda and Yasunori Yamamura and Katsunori Yamamura and Masanori Akazaki",
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AU - Honda, Chikahisa

AU - Maeda, Mitsuo

AU - Yamamura, Yasunori

AU - Yamamura, Katsunori

AU - Akazaki, Masanori

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