TY - JOUR
T1 - Measurement of preferential sputtering of iron-oxides using laser fluorescence spectroscopy
AU - Matsuda, Yoshinobu
AU - Yamaguchi, Kouji
AU - Suenaga, Kiyoyuki
AU - Yamagata, Yukihiko
AU - Honda, Chikahisa
AU - Maeda, Mitsuo
AU - Yamamura, Yasunori
AU - Yamamura, Katsunori
AU - Akazaki, Masanori
PY - 1988/11
Y1 - 1988/11
N2 - Laser fluorescence spectroscopy was used to obtain the velocity-distribution function of sputtered iron from iron oxides, and the fitting of the obtained profiles with the Thompson formula yielded the preferential sputtering of oxygen from iron oxides quantitatively.
AB - Laser fluorescence spectroscopy was used to obtain the velocity-distribution function of sputtered iron from iron oxides, and the fitting of the obtained profiles with the Thompson formula yielded the preferential sputtering of oxygen from iron oxides quantitatively.
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U2 - 10.1143/JJAP.27.L2022
DO - 10.1143/JJAP.27.L2022
M3 - Article
AN - SCOPUS:0024105536
VL - 27
SP - L2022-L2024
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 11 A
ER -