Measurement of preferential sputtering of iron-oxides using laser fluorescence spectroscopy

Yoshinobu Matsuda, Kouji Yamaguchi, Kiyoyuki Suenaga, Yukihiko Yamagata, Chikahisa Honda, Mitsuo Maeda, Yasunori Yamamura, Katsunori Yamamura, Masanori Akazaki

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Laser fluorescence spectroscopy was used to obtain the velocity-distribution function of sputtered iron from iron oxides, and the fitting of the obtained profiles with the Thompson formula yielded the preferential sputtering of oxygen from iron oxides quantitatively.

Original languageEnglish
Pages (from-to)L2022-L2024
JournalJapanese Journal of Applied Physics
Volume27
Issue number11 A
DOIs
Publication statusPublished - Nov 1988

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All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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