Measurement of preferential sputtering of iron-oxides using laser fluorescence spectroscopy

Yoshinobu Matsuda; Kouji Yamaguchi; Kiyoyuki Suenaga; Yukihiko Yamagata; Chikahisa Honda; Mitsuo Maeda; Yasunori Yamamura; Katsunori Yamamura; Masanori Akazaki

doi:10.1143/JJAP.27.L2022

Measurement of preferential sputtering of iron-oxides using laser fluorescence spectroscopy

Yoshinobu Matsuda, Kouji Yamaguchi, Kiyoyuki Suenaga, Yukihiko Yamagata, Chikahisa Honda, Mitsuo Maeda, Yasunori Yamamura, Katsunori Yamamura, Masanori Akazaki

Electrical Engineering Sciences

Research output: Contribution to journal › Article

4 Citations (Scopus)

Abstract

Laser fluorescence spectroscopy was used to obtain the velocity-distribution function of sputtered iron from iron oxides, and the fitting of the obtained profiles with the Thompson formula yielded the preferential sputtering of oxygen from iron oxides quantitatively.

Original language	English
Pages (from-to)	L2022-L2024
Journal	Japanese Journal of Applied Physics
Volume	27
Issue number	11 A
DOIs	https://doi.org/10.1143/JJAP.27.L2022
Publication status	Published - Nov 1988

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All Science Journal Classification (ASJC) codes

Engineering(all)
Physics and Astronomy(all)

Cite this

Matsuda, Y., Yamaguchi, K., Suenaga, K., Yamagata, Y., Honda, C., Maeda, M., ... Akazaki, M. (1988). Measurement of preferential sputtering of iron-oxides using laser fluorescence spectroscopy. Japanese Journal of Applied Physics, 27(11 A), L2022-L2024. https://doi.org/10.1143/JJAP.27.L2022

Measurement of preferential sputtering of iron-oxides using laser fluorescence spectroscopy. / Matsuda, Yoshinobu; Yamaguchi, Kouji; Suenaga, Kiyoyuki; Yamagata, Yukihiko; Honda, Chikahisa; Maeda, Mitsuo; Yamamura, Yasunori; Yamamura, Katsunori; Akazaki, Masanori.

In: Japanese Journal of Applied Physics, Vol. 27, No. 11 A, 11.1988, p. L2022-L2024.

Research output: Contribution to journal › Article

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author = "Yoshinobu Matsuda and Kouji Yamaguchi and Kiyoyuki Suenaga and Yukihiko Yamagata and Chikahisa Honda and Mitsuo Maeda and Yasunori Yamamura and Katsunori Yamamura and Masanori Akazaki",

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AU - Honda, Chikahisa

AU - Maeda, Mitsuo

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Access to Document

10.1143/JJAP.27.L2022