Abstract
Laser fluorescence spectroscopy was used to obtain the velocity-distribution function of sputtered iron from iron oxides, and the fitting of the obtained profiles with the Thompson formula yielded the preferential sputtering of oxygen from iron oxides quantitatively.
| Original language | English |
|---|---|
| Pages (from-to) | L2022-L2024 |
| Journal | Japanese Journal of Applied Physics |
| Volume | 27 |
| Issue number | 11 A |
| DOIs | |
| Publication status | Published - 1988 |
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All Science Journal Classification (ASJC) codes
- Engineering(all)
- Physics and Astronomy(all)
Cite this
Measurement of preferential sputtering of iron-oxides using laser fluorescence spectroscopy. / Matsuda, Yoshinobu; Yamaguchi, Kouji; Suenaga, Kiyoyuki; Yamagata, Yukihiko; Honda, Chikahisa; Maeda, Mitsuo; Yamamura, Yasunori; Yamamura, Katsunori; Akazaki, Masanori.
In: Japanese Journal of Applied Physics, Vol. 27, No. 11 A, 1988, p. L2022-L2024.Research output: Contribution to journal › Article
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TY - JOUR
T1 - Measurement of preferential sputtering of iron-oxides using laser fluorescence spectroscopy
AU - Matsuda, Yoshinobu
AU - Yamaguchi, Kouji
AU - Suenaga, Kiyoyuki
AU - Yamagata, Yukihiko
AU - Honda, Chikahisa
AU - Maeda, Mitsuo
AU - Yamamura, Yasunori
AU - Yamamura, Katsunori
AU - Akazaki, Masanori
PY - 1988
Y1 - 1988
N2 - Laser fluorescence spectroscopy was used to obtain the velocity-distribution function of sputtered iron from iron oxides, and the fitting of the obtained profiles with the Thompson formula yielded the preferential sputtering of oxygen from iron oxides quantitatively.
AB - Laser fluorescence spectroscopy was used to obtain the velocity-distribution function of sputtered iron from iron oxides, and the fitting of the obtained profiles with the Thompson formula yielded the preferential sputtering of oxygen from iron oxides quantitatively.
UR - http://www.scopus.com/inward/record.url?scp=0024105536&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0024105536&partnerID=8YFLogxK
U2 - 10.1143/JJAP.27.L2022
DO - 10.1143/JJAP.27.L2022
M3 - Article
VL - 27
SP - L2022-L2024
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 11 A
ER -