Measurement of probe-stylus sphere diameter for micro-CMM based on spectral fingerprint of whispering gallery modes

Masaki Michihata, Terutake Hayashi, Atsushi Adachi, Yasuhiro Takaya

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

Probe calibration contributes to the measurement uncertainty of micro-coordinate measuring machines (micro-CMMs). This study proposes a new method of measuring stylus sphere diameters for micro-CMMs based on the analysis of whispering gallery modes (WGMs). Depending on the incident wavelength, different WGMs will be excited in the probe stylus, resulting in a wavelength spectral fingerprint that is related to the sphere diameter. In this paper, the diameter of the microprobe stylus sphere was determined with a least-squares method using theoretical and measured spectra of WGMs. The measurement results showed that the precision of the proposed method was ±1 nm.

Original languageEnglish
Pages (from-to)469-472
Number of pages4
JournalCIRP Annals - Manufacturing Technology
Volume63
Issue number1
DOIs
Publication statusPublished - Jan 1 2014
Externally publishedYes

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All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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