Measurement of strain and strain relaxation in free-standing Si membranes by convergent beam electron diffraction and finite element method

H. Gao, K. Ikeda, S. Hata, H. Nakashima, D. Wang, H. Nakashima

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Fingerprint Dive into the research topics of 'Measurement of strain and strain relaxation in free-standing Si membranes by convergent beam electron diffraction and finite element method'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science