Measurement of Surface State Distributions in MOS Diodes with a Simple DLTS System

Teruaki Katsube, Koichi Kakimoto, Masashi Hara

Research output: Contribution to journalArticle

9 Citations (Scopus)
Original languageEnglish
Pages (from-to)2307-2308
Number of pages2
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume19
Issue number11
DOIs
Publication statusPublished - Jan 1 1980

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Deep level transient spectroscopy
Surface states
Diodes
diodes

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Measurement of Surface State Distributions in MOS Diodes with a Simple DLTS System. / Katsube, Teruaki; Kakimoto, Koichi; Hara, Masashi.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 19, No. 11, 01.01.1980, p. 2307-2308.

Research output: Contribution to journalArticle

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