TY - JOUR
T1 - Measurement of the neutral particle density in an electron cyclotron resonance plasma by rayleigh scattering
AU - Cronrath, Wolfgang
AU - Tanaka, Hiroyuki
AU - Bowden, Mark D.
AU - Uchino, Kiichiro
AU - Muraoka, Katsunori
PY - 1995/10
Y1 - 1995/10
N2 - The neutral atom density in an electron cyclotron resonance plasma has been directly measured for the first time using a combination of Rayleigh and Thomson scattering. The measurements were made in the source region of a 3 mTorr argon discharge, and indicated that the neutral atom density was at least 50% less than would be expected at a gas pressure of 3 mTorr. The decrease in the neutral atom density is attributed to the effect of ion-neutral charge exchange collisions in the plasma. The accuracy of the measurement was found to depend on the contribution of metastable atoms to the measured scattered signal.
AB - The neutral atom density in an electron cyclotron resonance plasma has been directly measured for the first time using a combination of Rayleigh and Thomson scattering. The measurements were made in the source region of a 3 mTorr argon discharge, and indicated that the neutral atom density was at least 50% less than would be expected at a gas pressure of 3 mTorr. The decrease in the neutral atom density is attributed to the effect of ion-neutral charge exchange collisions in the plasma. The accuracy of the measurement was found to depend on the contribution of metastable atoms to the measured scattered signal.
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U2 - 10.1143/JJAP.34.L1402
DO - 10.1143/JJAP.34.L1402
M3 - Article
AN - SCOPUS:0029387841
SN - 0021-4922
VL - 34
SP - L1402-L1404
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
IS - 10 B
ER -