Measurement of the thermal conductivity of nanodeposited material

Koji Takahashi, Norsyazwan Hilmi, Yohei Ito, Tatsuya Ikuta, Xing Zhang

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

The small size of nanomaterials deposited by either focused ions or electron beams has prevented the determination of reliable thermal property data by existing methods. A new method is described that uses a suspended platinum hot film to measure the thermal conductivity of a nanoscale deposition. The cross section of the Pt film needs to be as small as 50 nm × 500 nm to have sufficient sensitivity to detect the effect of the beam-induced nanodeposition. A direct current heating method is used before and after the deposition, and the change in the average temperature increase of the Pt hot film gives the thermal conductivity of the additional deposited material. In order to estimate the error introduced by the one-dimensional analytical model employed, a two-dimensional numerical simulation was conducted. It confirmed the reliability of this method for situations where the deposit extends onto the terminals by (1 μm or more. Measurements of amorphous carbon (a-C) films fabricated by electron beam induced deposition (EBID) produced thermal conductivities of 0.61 W • m -1 • K -1 to 0.73 W • m -1 • K -1 at 100 K to 340 K, values in good agreement with those of a-C thin films reported in the past.

Original languageEnglish
Pages (from-to)1864-1874
Number of pages11
JournalInternational Journal of Thermophysics
Volume30
Issue number6
DOIs
Publication statusPublished - Dec 1 2009

Fingerprint

thermal conductivity
electron beams
carbon
platinum
thermodynamic properties
direct current
ion beams
deposits
heating
sensitivity
cross sections
estimates
thin films
simulation
temperature

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics

Cite this

Measurement of the thermal conductivity of nanodeposited material. / Takahashi, Koji; Hilmi, Norsyazwan; Ito, Yohei; Ikuta, Tatsuya; Zhang, Xing.

In: International Journal of Thermophysics, Vol. 30, No. 6, 01.12.2009, p. 1864-1874.

Research output: Contribution to journalArticle

Takahashi, Koji ; Hilmi, Norsyazwan ; Ito, Yohei ; Ikuta, Tatsuya ; Zhang, Xing. / Measurement of the thermal conductivity of nanodeposited material. In: International Journal of Thermophysics. 2009 ; Vol. 30, No. 6. pp. 1864-1874.
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