TY - JOUR
T1 - Measurements of electron energy distribution functions in pulse-modulated Ar and Ar/O2 inductively coupled plasmas using laser Thomson scattering
AU - El-Sabbagh, Mansour A.M.
AU - Nakamura, Akinobu
AU - Yanagai, Toshiro
AU - Yamagata, Yukihiko
AU - Uchino, Kiichiro
PY - 2006/10/21
Y1 - 2006/10/21
N2 - The time-resolved electron energy distribution functions (EEDFs) in Ar and Ar/O2 pulse-modulated inductively coupled plasmas have been measured in the afterglow for the first time using laser Thomson scattering. The measurements were performed for RF powers of 100 and 500 W at a frequency of 13.56 MHz, a duty cycle of 50%, and a pulse repetition frequency of 12.5 kHz. The Ar pressures were 20 and 100 mTorr at a flow rate of 132 seem, and the Ar/O2 (10% O2) pressure was 20 mTorr at a flow rate of 132 sccm. The measured EEDFs were all Maxwellian for the Ar and Ar/O2 (10% O2) plasmas. The Maxwellian distributions in the afterglow may be attributed to electron-electron collisions.
AB - The time-resolved electron energy distribution functions (EEDFs) in Ar and Ar/O2 pulse-modulated inductively coupled plasmas have been measured in the afterglow for the first time using laser Thomson scattering. The measurements were performed for RF powers of 100 and 500 W at a frequency of 13.56 MHz, a duty cycle of 50%, and a pulse repetition frequency of 12.5 kHz. The Ar pressures were 20 and 100 mTorr at a flow rate of 132 seem, and the Ar/O2 (10% O2) pressure was 20 mTorr at a flow rate of 132 sccm. The measured EEDFs were all Maxwellian for the Ar and Ar/O2 (10% O2) plasmas. The Maxwellian distributions in the afterglow may be attributed to electron-electron collisions.
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U2 - 10.1143/JJAP.45.8118
DO - 10.1143/JJAP.45.8118
M3 - Article
AN - SCOPUS:34547864267
SN - 0021-4922
VL - 45
SP - 8118
EP - 8122
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
IS - 10 B
ER -