Measurements of electron energy distribution functions in pulse-modulated Ar and Ar/O2 inductively coupled plasmas using laser Thomson scattering

Mansour A.M. El-Sabbagh, Akinobu Nakamura, Toshiro Yanagai, Yukihiko Yamagata, Kiichiro Uchino

Research output: Contribution to journalArticlepeer-review

Abstract

The time-resolved electron energy distribution functions (EEDFs) in Ar and Ar/O2 pulse-modulated inductively coupled plasmas have been measured in the afterglow for the first time using laser Thomson scattering. The measurements were performed for RF powers of 100 and 500 W at a frequency of 13.56 MHz, a duty cycle of 50%, and a pulse repetition frequency of 12.5 kHz. The Ar pressures were 20 and 100 mTorr at a flow rate of 132 seem, and the Ar/O2 (10% O2) pressure was 20 mTorr at a flow rate of 132 sccm. The measured EEDFs were all Maxwellian for the Ar and Ar/O2 (10% O2) plasmas. The Maxwellian distributions in the afterglow may be attributed to electron-electron collisions.

Original languageEnglish
Pages (from-to)8118-8122
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume45
Issue number10 B
DOIs
Publication statusPublished - Oct 21 2006

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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