Measurements of electron temperature and density of a micro-discharge plasma using laser thomson scattering

Y. Noguchi, A. Matsuoka, M. D. Bowden, K. Uchino, K. Muraoka

Research output: Contribution to journalArticle

30 Citations (Scopus)

Abstract

Laser Thomson scattering was successfully applied to measure electron temperature (Te) and electron density (ne) in a micro-discharge plasma. This is the first time that this method has been used to obtain otherwise inaccessible plasma information from the near vicinity (0.3 mm) of a material surface. The key of the success was the suppression of strong stray laser light by using a triple-grating spectrometer. Values of electron temperature and density were Te = (0.4-1.6) eV and ne = (6-10) × 1018 m-3, depending on the time from the beginning of the pulsed discharge. The technique developed here is readily applicable to plasma display panel (PDP) discharges.

Original languageEnglish
Pages (from-to)326-329
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume40
Issue number1
DOIs
Publication statusPublished - Jan 2001

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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