Measurements of SiH4/H2 VHF plasma parameters with heated langmuir probe

T. Yamane, S. Nakao, Y. Takeuchi, H. Muta, R. Ichiki, K. Uchino, Y. Kawai

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Abstract

The parameters of a SiH4/H2 VHF plasma were measured as a function of silane gas concentration with a heated Langmuir probe. It was found that when the sailane gas concentration is increased, the nagative ion density increases. Here the negative ion density was estimated from the reduction of the electron saturation current. In addition, the dependence of the wall potential on the silane gas concentration agreed with the theoretical values derived from the Bohm sheath equation including negative ions.

Original languageEnglish
Pages (from-to)588-591
Number of pages4
JournalContributions to Plasma Physics
Volume53
Issue number8
DOIs
Publication statusPublished - Sep 1 2013

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All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics

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