Mechanism behind the crack formation in hydrogen doping Cz-Si crystal growth

Wataru Sugimura, Kousuke Takata, Masaki Tanaka, Kenji Higashida

    Research output: Contribution to journalArticlepeer-review

    2 Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'Mechanism behind the crack formation in hydrogen doping Cz-Si crystal growth'. Together they form a unique fingerprint.

    Engineering & Materials Science

    Physics & Astronomy

    Chemical Compounds