Mechanisms of heat and oxygen transfer in silicon melt in an electromagnetic Czochralski system

Koichi Kakimoto, Akimasa Tashiro, Takashige Shinozaki, Hideo Ishii, Yoshio Hashimoto

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20 Citations (Scopus)

Abstract

The three-dimensional time-dependent flow of silicon melt in an electromagnetic Czochralski system was numerically investigated. Two different types of electrodes were used in the mathematical modeling to determine the mechanisms of heat and oxygen transfer in the melt. The results showed that electromagnetic force in the azimuthal direction suppressed natural convection due to centrifugal force. It was also shown that heat and oxygen transfer from a crucible wall to the solid-liquid interface was enhanced due to off-centered vortices.

Original languageEnglish
Pages (from-to)55-65
Number of pages11
JournalJournal of Crystal Growth
Volume243
Issue number1
DOIs
Publication statusPublished - Aug 3 2002

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All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

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