Mechaphotonics device technology

Akinori Watabe, Jun ichi Shimada, Renshi Sawada, Hiroshi Nakada

Research output: Contribution to journalArticle

Abstract

Micro-machining and fine-assembling technologies functionally merge the monolithic formation process of opto-electronic semiconductors and dielectric materials. This paper describes (1) circular parallel beam conversion from the elliptical emission of a laser diode using a microlens and an adjustment free assembly method using an optical fiber guide formed on the laser substrate, (2) a micro-pump that finely controls the removal of liquid for an optical cross connection using a planner waveguides with narrow grooves where the light paths are switched to transmission or reflection by a refractive index matching liquid, and (3) fine assembling technology of a laser diode array using a laser position sensor.

Original languageEnglish
Pages (from-to)1115-1124
Number of pages10
JournalNTT R and D
Volume42
Issue number9
Publication statusPublished - Dec 1 1993

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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    Watabe, A., Shimada, J. I., Sawada, R., & Nakada, H. (1993). Mechaphotonics device technology. NTT R and D, 42(9), 1115-1124.