Mechaphotonics device technology

Akinori Watabe, Jun ichi Shimada, Renshi Sawada, Hiroshi Nakada

Research output: Contribution to journalArticle

Abstract

Micro-machining and fine-assembling technologies functionally merge the monolithic formation process of opto-electronic semiconductors and dielectric materials. This paper describes (1) circular parallel beam conversion from the elliptical emission of a laser diode using a microlens and an adjustment free assembly method using an optical fiber guide formed on the laser substrate, (2) a micro-pump that finely controls the removal of liquid for an optical cross connection using a planner waveguides with narrow grooves where the light paths are switched to transmission or reflection by a refractive index matching liquid, and (3) fine assembling technology of a laser diode array using a laser position sensor.

Original languageEnglish
Pages (from-to)1115-1124
Number of pages10
JournalNTT R and D
Volume42
Issue number9
Publication statusPublished - Dec 1 1993

Fingerprint

Semiconductor lasers
Lasers
Wave transmission
Liquids
Optical fibers
Refractive index
Machining
Waveguides
Pumps
Semiconductor materials
Sensors
Substrates

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Watabe, A., Shimada, J. I., Sawada, R., & Nakada, H. (1993). Mechaphotonics device technology. NTT R and D, 42(9), 1115-1124.

Mechaphotonics device technology. / Watabe, Akinori; Shimada, Jun ichi; Sawada, Renshi; Nakada, Hiroshi.

In: NTT R and D, Vol. 42, No. 9, 01.12.1993, p. 1115-1124.

Research output: Contribution to journalArticle

Watabe, A, Shimada, JI, Sawada, R & Nakada, H 1993, 'Mechaphotonics device technology', NTT R and D, vol. 42, no. 9, pp. 1115-1124.
Watabe A, Shimada JI, Sawada R, Nakada H. Mechaphotonics device technology. NTT R and D. 1993 Dec 1;42(9):1115-1124.
Watabe, Akinori ; Shimada, Jun ichi ; Sawada, Renshi ; Nakada, Hiroshi. / Mechaphotonics device technology. In: NTT R and D. 1993 ; Vol. 42, No. 9. pp. 1115-1124.
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