MEMS-based X-ray optics for astronomy, planetary exploration, and earth observation

Yuichiro Ezoe, Tomohiro Ogawa, Masahiro Ikuta, Mayu Sato, Kazuhisa Mitsuda, Hitomi Yamaguchi, Yoshiaki Kanamori, Kohei Morishita, Kazuo Nakajima, Hiroshi Hiroshima, Ryutaro Maeda

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We have been developing novel ultra lightweight X-ray optics based on MEMS technologies, aiming at future space missions whose objectives include X-ray astronomy, planetary exploration, and Earth observation. Sidewalls of DRIE- micro pores through thin silicon wafers are used for X-ray mirrors. Recently, we built a prototype of a 4-inch Wolter type-I optic and fabricated a 12-inch single-stage op-tic. In this paper, we review our development and future space applications.

Original languageEnglish
Title of host publication2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings
PublisherIEEE Computer Society
Pages127-128
Number of pages2
ISBN (Electronic)9780992841423
DOIs
Publication statusPublished - Oct 14 2014
Externally publishedYes
Event2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Glasgow, United Kingdom
Duration: Aug 17 2014Aug 21 2014

Publication series

NameInternational Conference on Optical MEMS and Nanophotonics
ISSN (Print)2160-5033
ISSN (Electronic)2160-5041

Other

Other2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014
CountryUnited Kingdom
CityGlasgow
Period8/17/148/21/14

Fingerprint

X ray optics
Astronomy
MEMS
Earth (planet)
X rays
Space applications
Silicon wafers
Optics

All Science Journal Classification (ASJC) codes

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Ezoe, Y., Ogawa, T., Ikuta, M., Sato, M., Mitsuda, K., Yamaguchi, H., ... Maeda, R. (2014). MEMS-based X-ray optics for astronomy, planetary exploration, and earth observation. In 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings (pp. 127-128). [6924553] (International Conference on Optical MEMS and Nanophotonics). IEEE Computer Society. https://doi.org/10.1109/OMN.2014.6924553

MEMS-based X-ray optics for astronomy, planetary exploration, and earth observation. / Ezoe, Yuichiro; Ogawa, Tomohiro; Ikuta, Masahiro; Sato, Mayu; Mitsuda, Kazuhisa; Yamaguchi, Hitomi; Kanamori, Yoshiaki; Morishita, Kohei; Nakajima, Kazuo; Hiroshima, Hiroshi; Maeda, Ryutaro.

2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings. IEEE Computer Society, 2014. p. 127-128 6924553 (International Conference on Optical MEMS and Nanophotonics).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ezoe, Y, Ogawa, T, Ikuta, M, Sato, M, Mitsuda, K, Yamaguchi, H, Kanamori, Y, Morishita, K, Nakajima, K, Hiroshima, H & Maeda, R 2014, MEMS-based X-ray optics for astronomy, planetary exploration, and earth observation. in 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings., 6924553, International Conference on Optical MEMS and Nanophotonics, IEEE Computer Society, pp. 127-128, 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014, Glasgow, United Kingdom, 8/17/14. https://doi.org/10.1109/OMN.2014.6924553
Ezoe Y, Ogawa T, Ikuta M, Sato M, Mitsuda K, Yamaguchi H et al. MEMS-based X-ray optics for astronomy, planetary exploration, and earth observation. In 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings. IEEE Computer Society. 2014. p. 127-128. 6924553. (International Conference on Optical MEMS and Nanophotonics). https://doi.org/10.1109/OMN.2014.6924553
Ezoe, Yuichiro ; Ogawa, Tomohiro ; Ikuta, Masahiro ; Sato, Mayu ; Mitsuda, Kazuhisa ; Yamaguchi, Hitomi ; Kanamori, Yoshiaki ; Morishita, Kohei ; Nakajima, Kazuo ; Hiroshima, Hiroshi ; Maeda, Ryutaro. / MEMS-based X-ray optics for astronomy, planetary exploration, and earth observation. 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings. IEEE Computer Society, 2014. pp. 127-128 (International Conference on Optical MEMS and Nanophotonics).
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