Metal-Induced Solid-Phase Crystallization of Amorphous SiGe Films on Insulator

Translated title of the contribution: Metal-Induced Solid-Phase Crystallization of Amorphous SiGe Films on Insulator

Hiroshi Kanno, Isao Tsunoda, Atsushi Kenjo, Taizoh Sadoh, Shinya Yamaguchi, Masanobu Miyao

Research output: Contribution to journalArticle

Translated title of the contributionMetal-Induced Solid-Phase Crystallization of Amorphous SiGe Films on Insulator
Original languageUndefined/Unknown
Pages (from-to)1933-1936
Number of pages4
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume42
Issue number1
Publication statusPublished - Apr 30 2003

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