Method of analysis of a single-peak dlts spectrum with two overlapping deep-trap responses

Hiroshi Nakashima, Tsuyoshi Miyagawa, Suehiro Sugitani, Kimio Hashimoto

    Research output: Contribution to journalArticle

    13 Citations (Scopus)

    Abstract

    In the usual DLTS technique, the trap activation energy is obtained from Arrhenius plots of the inverse of time constants set up experimentally vs the inverse peak temperatures of the DLTS signals. Considerable error, however, may appear in the activation energy when DLTS singals with a hump or shoulder are observed. In a special case, a single-peak DLTS is obtained when the signals due to two or more individual traps overlap. However, it is possible in this case to separate each deep-trap response from the overlapping DLTS signal by observing the injection pulse width dependence of the transient capacitance, and to determine the trap parameters such as the activation energy correctly. This paper presents a method for determining the trap parameters from the injection pulse width dependence of the DLTS spectrum.

    Original languageEnglish
    Pages (from-to)205-208
    Number of pages4
    JournalJapanese Journal of Applied Physics
    Volume25
    Issue number2 R
    DOIs
    Publication statusPublished - Feb 1986

    All Science Journal Classification (ASJC) codes

    • Engineering(all)
    • Physics and Astronomy(all)

    Fingerprint Dive into the research topics of 'Method of analysis of a single-peak dlts spectrum with two overlapping deep-trap responses'. Together they form a unique fingerprint.

  • Cite this