A prototype of "micro-beam" MEMS sensor that is made of a thin metallic film suspended across a trench on a silicon substrate was fabricated for examination of the feasibility of detecting thermal conductivity of gases and liquids. Heating the sensor in a sample demonstrated the potential measurement at a steady state because no natural convection took place during heating. The measured temperature rise of the sensor agreed fairly well with the temperature rise estimated by a numerical analysis of heat conduction to a sample fluid from the sensor with given measured dimensions. The temperature of the sensor was significantly higher in the air than FC-72 as well, indicating the feasibility of detecting thermal conductivity by the proposed method.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering