Micro-beam sensor for detection of thermal conductivity of gases and liquids

Hiroshi Takamatsu, Takanobu Fukunaga, Yuki Tanaka, Kosaku Kurata, Koji Takahashi

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)

Abstract

A prototype of "micro-beam" MEMS sensor that is made of a thin metallic film suspended across a trench on a silicon substrate was fabricated for examination of the feasibility of detecting thermal conductivity of gases and liquids. Heating the sensor in a sample demonstrated the potential measurement at a steady state because no natural convection took place during heating. The measured temperature rise of the sensor agreed fairly well with the temperature rise estimated by a numerical analysis of heat conduction to a sample fluid from the sensor with given measured dimensions. The temperature of the sensor was significantly higher in the air than FC-72 as well, indicating the feasibility of detecting thermal conductivity by the proposed method.

Original languageEnglish
Pages (from-to)10-16
Number of pages7
JournalSensors and Actuators, A: Physical
Volume206
DOIs
Publication statusPublished - Feb 1 2014

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Micro-beam sensor for detection of thermal conductivity of gases and liquids'. Together they form a unique fingerprint.

Cite this