Micro-encoder based on higher-order diffracted light interference

Eiji Higurashi, Renshi Sawada

Research output: Contribution to journalArticle

27 Citations (Scopus)

Abstract

A micro-encoder based on higher-order diffracted light interference has been developed for use in high-precision positioning. It uses ±3-order diffracted beams to obtain interference fringes for displacement detection and provides six signal periods for moving the scale grating by one grating period (3.2 νm) without an interpolation electric circuit. This micro-encoder head includes a distributed feedback laser diode, edge-illuminated refracting-facet photodiodes, a pair of polyimide waveguides, each with a total internal reflection mirror, and a micro-grating that causes ±3-order beams, diffracted by the scale grating, to interfere coaxially. All of these components are on a micromachined Si optical bench (3 × 2 mm2).

Original languageEnglish
Pages (from-to)1459-1465
Number of pages7
JournalJournal of Micromechanics and Microengineering
Volume15
Issue number8
DOIs
Publication statusPublished - Aug 1 2005

Fingerprint

Light interference
Distributed feedback lasers
Photodiodes
Polyimides
Semiconductor lasers
Interpolation
Mirrors
Waveguides
Networks (circuits)

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Micro-encoder based on higher-order diffracted light interference. / Higurashi, Eiji; Sawada, Renshi.

In: Journal of Micromechanics and Microengineering, Vol. 15, No. 8, 01.08.2005, p. 1459-1465.

Research output: Contribution to journalArticle

Higurashi, Eiji ; Sawada, Renshi. / Micro-encoder based on higher-order diffracted light interference. In: Journal of Micromechanics and Microengineering. 2005 ; Vol. 15, No. 8. pp. 1459-1465.
@article{674cbacb48d542e393e63b210b68f8dd,
title = "Micro-encoder based on higher-order diffracted light interference",
abstract = "A micro-encoder based on higher-order diffracted light interference has been developed for use in high-precision positioning. It uses ±3-order diffracted beams to obtain interference fringes for displacement detection and provides six signal periods for moving the scale grating by one grating period (3.2 νm) without an interpolation electric circuit. This micro-encoder head includes a distributed feedback laser diode, edge-illuminated refracting-facet photodiodes, a pair of polyimide waveguides, each with a total internal reflection mirror, and a micro-grating that causes ±3-order beams, diffracted by the scale grating, to interfere coaxially. All of these components are on a micromachined Si optical bench (3 × 2 mm2).",
author = "Eiji Higurashi and Renshi Sawada",
year = "2005",
month = "8",
day = "1",
doi = "10.1088/0960-1317/15/8/012",
language = "English",
volume = "15",
pages = "1459--1465",
journal = "Journal of Micromechanics and Microengineering",
issn = "0960-1317",
publisher = "IOP Publishing Ltd.",
number = "8",

}

TY - JOUR

T1 - Micro-encoder based on higher-order diffracted light interference

AU - Higurashi, Eiji

AU - Sawada, Renshi

PY - 2005/8/1

Y1 - 2005/8/1

N2 - A micro-encoder based on higher-order diffracted light interference has been developed for use in high-precision positioning. It uses ±3-order diffracted beams to obtain interference fringes for displacement detection and provides six signal periods for moving the scale grating by one grating period (3.2 νm) without an interpolation electric circuit. This micro-encoder head includes a distributed feedback laser diode, edge-illuminated refracting-facet photodiodes, a pair of polyimide waveguides, each with a total internal reflection mirror, and a micro-grating that causes ±3-order beams, diffracted by the scale grating, to interfere coaxially. All of these components are on a micromachined Si optical bench (3 × 2 mm2).

AB - A micro-encoder based on higher-order diffracted light interference has been developed for use in high-precision positioning. It uses ±3-order diffracted beams to obtain interference fringes for displacement detection and provides six signal periods for moving the scale grating by one grating period (3.2 νm) without an interpolation electric circuit. This micro-encoder head includes a distributed feedback laser diode, edge-illuminated refracting-facet photodiodes, a pair of polyimide waveguides, each with a total internal reflection mirror, and a micro-grating that causes ±3-order beams, diffracted by the scale grating, to interfere coaxially. All of these components are on a micromachined Si optical bench (3 × 2 mm2).

UR - http://www.scopus.com/inward/record.url?scp=22544435558&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=22544435558&partnerID=8YFLogxK

U2 - 10.1088/0960-1317/15/8/012

DO - 10.1088/0960-1317/15/8/012

M3 - Article

VL - 15

SP - 1459

EP - 1465

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

SN - 0960-1317

IS - 8

ER -