Micro-fabrication and characterization methods for dimensionally-controlled polymeric materils

Atsushi Takahara, Shigekazu Yasutake, Masamichi Morita, Tomoyuki Koga, Jun Fukai

Research output: Contribution to journalReview article

Abstract

The authors have proposed herein a novel micro-fabrication method of polymer ultrathin films with a combination of the fluoroalkylsilane monolayer patterned substrates and ink-jet (IJ) method. The purpose of this study is to establish the fundamental technique of site-selective formation of polymer thin film utilizing wetting contrast of patterned fluoroalkylsilane monolayer (R f)/silanol (Si-OH) surface. Rf/Si-OH patterned surface prepared by the VUV-rays lithography have lyophobic Rf and lyophilic Si-OH phases, respectively. Polystyrene/xylene solution was coated on the patterned surface with wetting contrast by the ink-jet method. The patterned polystyrene ultrathin films were selectively formed on lyophilic areas. Thses patterned monolayer and polymer ultrathin films were characterized by novel characterization techniques such as temperature dependent lateral force microscopy, FE-SEM, Enviromental-SEM, and imaging XPS.

Original languageEnglish
Pages (from-to)4283-4285
Number of pages3
JournalPolymer Preprints, Japan
Volume54
Issue number2
Publication statusPublished - Dec 1 2005
Event54th SPSJ Symposium on Macromolecules - Yamagata, Japan
Duration: Sep 20 2005Sep 22 2005

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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