Micro-fabrication and characterization methods for dimensionally-controlled polymeric materils

Atsushi Takahara, Shigekazu Yasutake, Masamichi Morita, Tomoyuki Koga, Jun Fukai

Research output: Contribution to journalReview article

Abstract

The authors have proposed herein a novel micro-fabrication method of polymer ultrathin films with a combination of the fluoroalkylsilane monolayer patterned substrates and ink-jet (IJ) method. The purpose of this study is to establish the fundamental technique of site-selective formation of polymer thin film utilizing wetting contrast of patterned fluoroalkylsilane monolayer (R f)/silanol (Si-OH) surface. Rf/Si-OH patterned surface prepared by the VUV-rays lithography have lyophobic Rf and lyophilic Si-OH phases, respectively. Polystyrene/xylene solution was coated on the patterned surface with wetting contrast by the ink-jet method. The patterned polystyrene ultrathin films were selectively formed on lyophilic areas. Thses patterned monolayer and polymer ultrathin films were characterized by novel characterization techniques such as temperature dependent lateral force microscopy, FE-SEM, Enviromental-SEM, and imaging XPS.

Original languageEnglish
Pages (from-to)4283-4285
Number of pages3
JournalPolymer Preprints, Japan
Volume54
Issue number2
Publication statusPublished - Dec 1 2005

Fingerprint

Ultrathin films
Microfabrication
Polymer films
Monolayers
Ink
Wetting
Polystyrenes
Scanning electron microscopy
Xylene
Lithography
Microscopic examination
X ray photoelectron spectroscopy
Imaging techniques
Thin films
Substrates
Temperature

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Micro-fabrication and characterization methods for dimensionally-controlled polymeric materils. / Takahara, Atsushi; Yasutake, Shigekazu; Morita, Masamichi; Koga, Tomoyuki; Fukai, Jun.

In: Polymer Preprints, Japan, Vol. 54, No. 2, 01.12.2005, p. 4283-4285.

Research output: Contribution to journalReview article

Takahara, Atsushi ; Yasutake, Shigekazu ; Morita, Masamichi ; Koga, Tomoyuki ; Fukai, Jun. / Micro-fabrication and characterization methods for dimensionally-controlled polymeric materils. In: Polymer Preprints, Japan. 2005 ; Vol. 54, No. 2. pp. 4283-4285.
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