Micro field emitter with nano-pillarets formed by reactive ion etching of photoresist

Akiyoshi Baba, Tomoya Yoshida, Tanemasa Asano

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

We investigate the feasibility of nano-pillarets prepared by reactive ion etching (RIE) with oxygen gas of a photoresist material for application to a field electron emitter. Auger electron spectroscopy (AES) of the photoresist film before and after the RIE was carried out to investigate the formation mechanism of the nano-pillarets. The results strongly indicated that iron particles deposited on the photoresist surface from the reaction chamber contribute to the nano-pillaret formation. Fabrication of a gated cold cathode using the nano-pillarets as an electron emitter is demonstrated using a self-alignment technique. Field electron characteristics of the nano-pillaret cathode were measured using a triode configuration with a phosphor screen as a collector electrode. It was found that the turn-on voltage of the emitter was 50V and emission current of the order of 10-6 A was obtained at the gate voltage of 100 V.

Original languageEnglish
Pages (from-to)4054-4058
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
Volume42
Issue number6 B
Publication statusPublished - Jun 2003
Externally publishedYes

Fingerprint

Reactive ion etching
Photoresists
photoresists
emitters
etching
Electrons
Cathodes
self alignment
Triodes
cold cathodes
ions
triodes
electrons
Electric potential
electric potential
Auger electron spectroscopy
Phosphors
accumulators
Auger spectroscopy
phosphors

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

Cite this

Micro field emitter with nano-pillarets formed by reactive ion etching of photoresist. / Baba, Akiyoshi; Yoshida, Tomoya; Asano, Tanemasa.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes, Vol. 42, No. 6 B, 06.2003, p. 4054-4058.

Research output: Contribution to journalArticle

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