Micro field emitter with nano-pillarets formed by RIE of photoresist

A. Baba, T. Yoshida, Tanemasa Asano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We report for the first time the fabrication and emission characteristics of a gated micro-cold cathode whose emitter is made of nano-pillarets. We successfully fabricated the gated nano-pillarets emitter using a self-aligned formation process and the field electron emission from the gated emitter was demonstrated.

Original languageEnglish
Title of host publication2002 International Microprocesses and Nanotechnology Conference, MNC 2002
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages332-333
Number of pages2
ISBN (Electronic)4891140313, 9784891140311
DOIs
Publication statusPublished - Jan 1 2002
Externally publishedYes
EventInternational Microprocesses and Nanotechnology Conference, MNC 2002 - Tokyo, Japan
Duration: Nov 6 2002Nov 8 2002

Other

OtherInternational Microprocesses and Nanotechnology Conference, MNC 2002
CountryJapan
CityTokyo
Period11/6/0211/8/02

Fingerprint

Electron emission
Reactive ion etching
Photoresists
Cathodes
Fabrication

All Science Journal Classification (ASJC) codes

  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Baba, A., Yoshida, T., & Asano, T. (2002). Micro field emitter with nano-pillarets formed by RIE of photoresist. In 2002 International Microprocesses and Nanotechnology Conference, MNC 2002 (pp. 332-333). [1178678] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IMNC.2002.1178678

Micro field emitter with nano-pillarets formed by RIE of photoresist. / Baba, A.; Yoshida, T.; Asano, Tanemasa.

2002 International Microprocesses and Nanotechnology Conference, MNC 2002. Institute of Electrical and Electronics Engineers Inc., 2002. p. 332-333 1178678.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Baba, A, Yoshida, T & Asano, T 2002, Micro field emitter with nano-pillarets formed by RIE of photoresist. in 2002 International Microprocesses and Nanotechnology Conference, MNC 2002., 1178678, Institute of Electrical and Electronics Engineers Inc., pp. 332-333, International Microprocesses and Nanotechnology Conference, MNC 2002, Tokyo, Japan, 11/6/02. https://doi.org/10.1109/IMNC.2002.1178678
Baba A, Yoshida T, Asano T. Micro field emitter with nano-pillarets formed by RIE of photoresist. In 2002 International Microprocesses and Nanotechnology Conference, MNC 2002. Institute of Electrical and Electronics Engineers Inc. 2002. p. 332-333. 1178678 https://doi.org/10.1109/IMNC.2002.1178678
Baba, A. ; Yoshida, T. ; Asano, Tanemasa. / Micro field emitter with nano-pillarets formed by RIE of photoresist. 2002 International Microprocesses and Nanotechnology Conference, MNC 2002. Institute of Electrical and Electronics Engineers Inc., 2002. pp. 332-333
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