Micro field emitter with nano-pillarets formed by RIE of photoresist

A. Baba; T. Yoshida; T. Asano

doi:10.1109/IMNC.2002.1178678

Micro field emitter with nano-pillarets formed by RIE of photoresist

A. Baba, T. Yoshida, T. Asano

Center for Japan-Egypt Cooperation in Science and Technology（E-JUST Center）

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We report for the first time the fabrication and emission characteristics of a gated micro-cold cathode whose emitter is made of nano-pillarets. We successfully fabricated the gated nano-pillarets emitter using a self-aligned formation process and the field electron emission from the gated emitter was demonstrated.

Original language	English
Title of host publication	2002 International Microprocesses and Nanotechnology Conference, MNC 2002
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	332-333
Number of pages	2
ISBN (Electronic)	4891140313, 9784891140311
DOIs	https://doi.org/10.1109/IMNC.2002.1178678
Publication status	Published - Jan 1 2002
Event	International Microprocesses and Nanotechnology Conference, MNC 2002 - Tokyo, Japan Duration: Nov 6 2002 → Nov 8 2002

Other

Other	International Microprocesses and Nanotechnology Conference, MNC 2002
Country/Territory	Japan
City	Tokyo
Period	11/6/02 → 11/8/02

All Science Journal Classification (ASJC) codes

Hardware and Architecture
Electrical and Electronic Engineering

Access to Document

10.1109/IMNC.2002.1178678

Cite this

Baba, A, Yoshida, T & Asano, T 2002, Micro field emitter with nano-pillarets formed by RIE of photoresist. in 2002 International Microprocesses and Nanotechnology Conference, MNC 2002., 1178678, Institute of Electrical and Electronics Engineers Inc., pp. 332-333, International Microprocesses and Nanotechnology Conference, MNC 2002, Tokyo, Japan, 11/6/02. https://doi.org/10.1109/IMNC.2002.1178678

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abstract = "We report for the first time the fabrication and emission characteristics of a gated micro-cold cathode whose emitter is made of nano-pillarets. We successfully fabricated the gated nano-pillarets emitter using a self-aligned formation process and the field electron emission from the gated emitter was demonstrated.",

author = "A. Baba and T. Yoshida and T. Asano",

year = "2002",

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doi = "10.1109/IMNC.2002.1178678",

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AU - Baba, A.

AU - Yoshida, T.

AU - Asano, T.

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Y1 - 2002/1/1

N2 - We report for the first time the fabrication and emission characteristics of a gated micro-cold cathode whose emitter is made of nano-pillarets. We successfully fabricated the gated nano-pillarets emitter using a self-aligned formation process and the field electron emission from the gated emitter was demonstrated.

AB - We report for the first time the fabrication and emission characteristics of a gated micro-cold cathode whose emitter is made of nano-pillarets. We successfully fabricated the gated nano-pillarets emitter using a self-aligned formation process and the field electron emission from the gated emitter was demonstrated.

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DO - 10.1109/IMNC.2002.1178678

M3 - Conference contribution

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EP - 333

BT - 2002 International Microprocesses and Nanotechnology Conference, MNC 2002

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - International Microprocesses and Nanotechnology Conference, MNC 2002

Y2 - 6 November 2002 through 8 November 2002

ER -

Micro field emitter with nano-pillarets formed by RIE of photoresist

Abstract

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