Micro IC probe for LSI testing

Takahiro Ito, Renshi Sawada, Eiji Higurashi

    Research output: Contribution to conferencePaperpeer-review

    16 Citations (Scopus)

    Abstract

    A micro IC probe, which is a small elastic electrical contact, has been developed to improve LSI testing and reduce its cost. No larger than 300 μm×80 μm, it is fabricated with a pitch of 100 μm by micromachining techniques. Its contact resistance is less than 0.5 Ω, satisfying the requirements for conventional probes, and its compliance is 2-8 μm to accommodate height differences between LSI pads while maintaining contact with them.

    Original languageEnglish
    Pages263-266
    Number of pages4
    DOIs
    Publication statusPublished - 1999
    EventProceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS - Orlando, FL, USA
    Duration: Jan 17 1999Jan 21 1999

    Other

    OtherProceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS
    CityOrlando, FL, USA
    Period1/17/991/21/99

    All Science Journal Classification (ASJC) codes

    • Control and Systems Engineering
    • Mechanical Engineering
    • Electrical and Electronic Engineering

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