Micro IC probe for LSI testing

Takahiro Ito, Renshi Sawada, Eiji Higurashi

Research output: Contribution to conferencePaper

16 Citations (Scopus)

Abstract

A micro IC probe, which is a small elastic electrical contact, has been developed to improve LSI testing and reduce its cost. No larger than 300 μm×80 μm, it is fabricated with a pitch of 100 μm by micromachining techniques. Its contact resistance is less than 0.5 Ω, satisfying the requirements for conventional probes, and its compliance is 2-8 μm to accommodate height differences between LSI pads while maintaining contact with them.

Original languageEnglish
Pages263-266
Number of pages4
Publication statusPublished - Jan 1 1999
EventProceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS - Orlando, FL, USA
Duration: Jan 17 1999Jan 21 1999

Other

OtherProceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS
CityOrlando, FL, USA
Period1/17/991/21/99

Fingerprint

Micromachining
Testing
Contact resistance
Costs
Compliance

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Ito, T., Sawada, R., & Higurashi, E. (1999). Micro IC probe for LSI testing. 263-266. Paper presented at Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS, Orlando, FL, USA, .

Micro IC probe for LSI testing. / Ito, Takahiro; Sawada, Renshi; Higurashi, Eiji.

1999. 263-266 Paper presented at Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS, Orlando, FL, USA, .

Research output: Contribution to conferencePaper

Ito, T, Sawada, R & Higurashi, E 1999, 'Micro IC probe for LSI testing', Paper presented at Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS, Orlando, FL, USA, 1/17/99 - 1/21/99 pp. 263-266.
Ito T, Sawada R, Higurashi E. Micro IC probe for LSI testing. 1999. Paper presented at Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS, Orlando, FL, USA, .
Ito, Takahiro ; Sawada, Renshi ; Higurashi, Eiji. / Micro IC probe for LSI testing. Paper presented at Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS, Orlando, FL, USA, .4 p.
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