Micro IC probe for LSI testing

Takahiro Ito, Renshi Sawada, Eiji Higurashi

Research output: Contribution to conferencePaper

16 Citations (Scopus)

Abstract

A micro IC probe, which is a small elastic electrical contact, has been developed to improve LSI testing and reduce its cost. No larger than 300 μm×80 μm, it is fabricated with a pitch of 100 μm by micromachining techniques. Its contact resistance is less than 0.5 Ω, satisfying the requirements for conventional probes, and its compliance is 2-8 μm to accommodate height differences between LSI pads while maintaining contact with them.

Original languageEnglish
Pages263-266
Number of pages4
DOIs
Publication statusPublished - 1999
EventProceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS - Orlando, FL, USA
Duration: Jan 17 1999Jan 21 1999

Other

OtherProceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS
CityOrlando, FL, USA
Period1/17/991/21/99

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Ito, T., Sawada, R., & Higurashi, E. (1999). Micro IC probe for LSI testing. 263-266. Paper presented at Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS, Orlando, FL, USA, . https://doi.org/10.1109/memsys.1999.746830