Abstract
Isolation valve system for low-cost liquid tank array is designed and demonstrated. This valve is normally closed and opens only once for liquid injection. This array system can supply precise amount of liquid at each operation as many times as the number of tanks. In order to tolerate the ambient high pressure and to accomplish the perfect injection, a large and thick membrane is fabricated and tested as valve. Without any special structure, our valves are found to open just by applying low AC voltage to a pair of electrodes that are apart from each other by tens of micrometers. Dielectric breakdown and pressure increase inside tank are found to work effectively to form a large hole.
Original language | English |
---|---|
Title of host publication | Micro-Electro-Mechanical Systems (MEMS) - 2001 |
Editors | A.L. Lee, J. Simon, K. Breuer, S. Chen, R.S. Keynton, A. Malshe, J.-I. Mou, M. Dunn |
Pages | 271-276 |
Number of pages | 6 |
Volume | 3 |
Publication status | Published - 2001 |
Event | 2001 ASME International Mechanical Engineering Congress and Exposition - New York, NY, United States Duration: Nov 11 2001 → Nov 16 2001 |
Other
Other | 2001 ASME International Mechanical Engineering Congress and Exposition |
---|---|
Country/Territory | United States |
City | New York, NY |
Period | 11/11/01 → 11/16/01 |
All Science Journal Classification (ASJC) codes
- Engineering(all)