粉末冶金とレーザ加工の複合プロセスによるセラミックシート上への微細パターンの形成

Translated title of the contribution: Micro Patterning on the Sheets of Ceramic Material by a Combined Process of Laser Machining and Powder Metallurgy

津守 不二夫, 長谷川 修, 長田 稔子, 三浦 秀士

Research output: Contribution to journalArticle

Abstract

This study aims at combining the laser micro machining technology with the powder metallurgy process for fabricating the ceramic sheets with a fine pattern on the surface. The ceramic sheets were so fragile after sintering that a compound material, a mixture of ceramic powder and polymer, was prepared for laser machining, followed by debinding and sintering. Yttria stabilized zirconia (YSZ) was employed as a starting material, considering that the obtained sheet could be applied for the electrolyte layer of the solid oxide fuel cell. Polyvinyl alcohol was also prepared as polymer binder for aqueous solution. The compound sheets were formed by laser irradiation varying such laser conditions as laser power and frequency to investigate the effect of the laser irradiation on the depth and width of the pattern. The laser-machined compound sheets were successfully debound and sintered, and dense ceramic sheets were finally obtained.
Translated title of the contributionMicro Patterning on the Sheets of Ceramic Material by a Combined Process of Laser Machining and Powder Metallurgy
Original languageJapanese
Pages (from-to)255-261
Number of pages7
JournalFuntai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy
Volume61
Issue number5
DOIs
Publication statusPublished - 2014

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