Micro-probing system for coordinate metrology using a particle controlled by optical radiation pressure based on standing wave scale sensing method

Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Currently, micro-components are required to fabricate with great precision owing to the miniaturization of complex product. In order to assess the dimension, size, and other geometric quantities of such complex micro-components, technological progress is needed in micro- and nano-coordinate metrology. Therefore, the coordinate metrology have been attempted thus far. To establish nano-coordinate metrology with a microprobe technique, we have been developing the optically trapped probe, whose principle is based on the single-beam gradient-force optical trap of a particle in air. However, the rapidly increasing complexity including micro-fine figures makes it difficult to evaluate geometric quantities using a microprobe that can barely access a concave surface. An improved microprobe is required to have a better long working distance, wide measurement range, and high resolution. In this paper, a novel probing technique for coordinate metrology is discussed. The proposed method is based on optical interference, which is seen as a standing wave pattern, also called a standing wave scale. The feasibility is examined by the profile measurement of a smooth surface with high accuracy and the dimensional measurement of a trench structure.

Original languageEnglish
Title of host publicationInternational Conference on Optics in Precision Engineering and Nanotechnology, icOPEN 2013
Volume8769
DOIs
Publication statusPublished - Aug 15 2013
Externally publishedYes
EventInternational Conference on Optics in Precision Engineering and Nanotechnology, icOPEN 2013 - Singapore, Singapore
Duration: Apr 9 2013Apr 11 2013

Other

OtherInternational Conference on Optics in Precision Engineering and Nanotechnology, icOPEN 2013
CountrySingapore
CitySingapore
Period4/9/134/11/13

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Micro-probing system for coordinate metrology using a particle controlled by optical radiation pressure based on standing wave scale sensing method'. Together they form a unique fingerprint.

Cite this