Micro-refrigerator fabricated on silicon wafer

Y. Takata, K. Sugahara, T. Tachikawa, S. Moroe, H. Kubota, M. Kohno, K. Takahashi, T. Koshimizu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A prototype Joule-Thomson micro-cooler was fabricated on silicon wafer by making use of photofabrication. The microcooler uses ethylene as a refrigerant and it consists mainly of heat exchanger and evaporator. The cooling power of 20mW at evaporator temperature of 272K was attained at the inlet and outlet gas pressures of 2.5MPa and 0.1MPa, respectively. To understand the low cooling performance, numerical analysis of heat exchanger has been done and the effects of mass flow rate and thermal conductivity of solid on temperature profiles and effectiveness were examined. It was found that the flow rate of present experiment is too large and the decrease in flow rate gives better temperature effectiveness of heat exchanger. It was also found that the low thermal conductivity of solid improves the performance of heat exchanger.

Original languageEnglish
Title of host publicationProceedings of the 5th International Conference on Nanochannels, Microchannels and Minichannels, ICNMM2007
Pages749-754
Number of pages6
DOIs
Publication statusPublished - Dec 21 2007
Event5th International Conference on Nanochannels, Microchannels and Minichannels, ICNMM2007 - Puebla, Mexico
Duration: Jun 18 2007Jun 20 2007

Publication series

NameProceedings of the 5th International Conference on Nanochannels, Microchannels and Minichannels, ICNMM2007

Other

Other5th International Conference on Nanochannels, Microchannels and Minichannels, ICNMM2007
CountryMexico
CityPuebla
Period6/18/076/20/07

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Physics and Astronomy(all)

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