Micro-thermoelectric devices with ceramic combustors

Woosuck Shin, Kazuki Tajima, Yeongsoo Choi, Maiko Nishibori, Noriya Izu, Ichiro Matsubara, Norimitsu Murayama

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Abstract

A combustor of Pt/alumina catalyst was developed for the integration on micro-thermoelectric hydrogen sensor (μ-THS) with a dispenser method. The Pt/alumina catalyst was deposited on Si substrate and the hydrogen/air mixture gas was flowed to test the combustion performance. The effect of the catalyst size was investigated with respect to the thermoelectric voltage (ΔVs) and the temperature difference developed by the heat generated from the hydrogen oxidation on the catalyst. The temperature difference between the catalyst surface and the Si substrate was maximum for the device with the catalyst size of φ{symbol} = 0.8 mm. For that temperature, the catalyst with a size smaller than the membrane, has developed the highest ΔVs because of its good thermal insulation and high combustion performance. For the gas mixture of hydrogen/air, the μ-THS showed wide range hydrogen detection, 5 ppm -3%, with the ΔVs of 0.007-34 mV.

Original languageEnglish
Pages (from-to)411-418
Number of pages8
JournalSensors and Actuators, A: Physical
Volume130-131
Issue numberSPEC. ISS.
DOIs
Publication statusPublished - Aug 14 2006
Externally publishedYes

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

Cite this

Shin, W., Tajima, K., Choi, Y., Nishibori, M., Izu, N., Matsubara, I., & Murayama, N. (2006). Micro-thermoelectric devices with ceramic combustors. Sensors and Actuators, A: Physical, 130-131(SPEC. ISS.), 411-418. https://doi.org/10.1016/j.sna.2006.01.006