Microcalorimeter-type energy dispersive X-ray spectrometer for a transmission electron microscope

Toru Hara, Keiichi Tanaka, Keisuke Maehata, Kazuhisa Mitsuda, Noriko Y. Yamasaki, Mitsuaki Ohsaki, Katsuaki Watanabe, Xiuzhen Yu, Takuji Ito, Yoshihiro Yamanaka

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

A new energy dispersive X-ray spectrometer (EDS) with a mi- crocalorimeter detector equipped with a transmission electron microscope (TEM) has been developed for high- accuracy compositional analysis in the nanoscale. A superconducting transition-edge-sensor-type microcalorimeter is applied as the detector. A cryogen-free cooling system, which consists of a mechanical and a dilution refrigerator, is selected to achieve long-term temperature stability. In order to mount these detector and refrigerators on a TEM, the cooling system is specially designed such that these two refrigerators are separated. Also, the detector position and arrangement are carefully designed to avoid adverse affects between the superconductor detector and the TEM lens system. Using the developed EDS system, at present, an energy resolution of 21.92 eV full-width-at-half maximum has been achieved at the Cr Kα line. This value is about seven times better than that of the current typical commercial Si(Li) detector, which is usually around 140 eV. The developed microcalorimeter EDS system can measure a wide energy range, 1-20 keV, at one time with this high energy resolution that can resolve peaks from most of the elements. Although several further developments will be needed to enable practical use, highly accurate compositional analysis with high energy resolution will be realized by this microcalorimeter EDS system.

Original languageEnglish
Pages (from-to)17-26
Number of pages10
JournalJournal of Electron Microscopy
Volume59
Issue number1
DOIs
Publication statusPublished - Feb 1 2010

Fingerprint

X ray spectrometers
calorimeters
Electron microscopes
electron microscopes
X-Rays
spectrometers
Electrons
Detectors
Energy dispersive spectroscopy
Refrigerators
detectors
refrigerators
x rays
cooling systems
Cooling systems
Lenses
energy
K lines
Temperature
Full width at half maximum

All Science Journal Classification (ASJC) codes

  • Instrumentation

Cite this

Microcalorimeter-type energy dispersive X-ray spectrometer for a transmission electron microscope. / Hara, Toru; Tanaka, Keiichi; Maehata, Keisuke; Mitsuda, Kazuhisa; Yamasaki, Noriko Y.; Ohsaki, Mitsuaki; Watanabe, Katsuaki; Yu, Xiuzhen; Ito, Takuji; Yamanaka, Yoshihiro.

In: Journal of Electron Microscopy, Vol. 59, No. 1, 01.02.2010, p. 17-26.

Research output: Contribution to journalArticle

Hara, T, Tanaka, K, Maehata, K, Mitsuda, K, Yamasaki, NY, Ohsaki, M, Watanabe, K, Yu, X, Ito, T & Yamanaka, Y 2010, 'Microcalorimeter-type energy dispersive X-ray spectrometer for a transmission electron microscope', Journal of Electron Microscopy, vol. 59, no. 1, pp. 17-26. https://doi.org/10.1093/jmicro/dfp043
Hara, Toru ; Tanaka, Keiichi ; Maehata, Keisuke ; Mitsuda, Kazuhisa ; Yamasaki, Noriko Y. ; Ohsaki, Mitsuaki ; Watanabe, Katsuaki ; Yu, Xiuzhen ; Ito, Takuji ; Yamanaka, Yoshihiro. / Microcalorimeter-type energy dispersive X-ray spectrometer for a transmission electron microscope. In: Journal of Electron Microscopy. 2010 ; Vol. 59, No. 1. pp. 17-26.
@article{324a015b990e4ace9b1d39d8ff319b6b,
title = "Microcalorimeter-type energy dispersive X-ray spectrometer for a transmission electron microscope",
abstract = "A new energy dispersive X-ray spectrometer (EDS) with a mi- crocalorimeter detector equipped with a transmission electron microscope (TEM) has been developed for high- accuracy compositional analysis in the nanoscale. A superconducting transition-edge-sensor-type microcalorimeter is applied as the detector. A cryogen-free cooling system, which consists of a mechanical and a dilution refrigerator, is selected to achieve long-term temperature stability. In order to mount these detector and refrigerators on a TEM, the cooling system is specially designed such that these two refrigerators are separated. Also, the detector position and arrangement are carefully designed to avoid adverse affects between the superconductor detector and the TEM lens system. Using the developed EDS system, at present, an energy resolution of 21.92 eV full-width-at-half maximum has been achieved at the Cr Kα line. This value is about seven times better than that of the current typical commercial Si(Li) detector, which is usually around 140 eV. The developed microcalorimeter EDS system can measure a wide energy range, 1-20 keV, at one time with this high energy resolution that can resolve peaks from most of the elements. Although several further developments will be needed to enable practical use, highly accurate compositional analysis with high energy resolution will be realized by this microcalorimeter EDS system.",
author = "Toru Hara and Keiichi Tanaka and Keisuke Maehata and Kazuhisa Mitsuda and Yamasaki, {Noriko Y.} and Mitsuaki Ohsaki and Katsuaki Watanabe and Xiuzhen Yu and Takuji Ito and Yoshihiro Yamanaka",
year = "2010",
month = "2",
day = "1",
doi = "10.1093/jmicro/dfp043",
language = "English",
volume = "59",
pages = "17--26",
journal = "Microscopy (Oxford, England)",
issn = "2050-5698",
publisher = "Japanese Society of Microscopy",
number = "1",

}

TY - JOUR

T1 - Microcalorimeter-type energy dispersive X-ray spectrometer for a transmission electron microscope

AU - Hara, Toru

AU - Tanaka, Keiichi

AU - Maehata, Keisuke

AU - Mitsuda, Kazuhisa

AU - Yamasaki, Noriko Y.

AU - Ohsaki, Mitsuaki

AU - Watanabe, Katsuaki

AU - Yu, Xiuzhen

AU - Ito, Takuji

AU - Yamanaka, Yoshihiro

PY - 2010/2/1

Y1 - 2010/2/1

N2 - A new energy dispersive X-ray spectrometer (EDS) with a mi- crocalorimeter detector equipped with a transmission electron microscope (TEM) has been developed for high- accuracy compositional analysis in the nanoscale. A superconducting transition-edge-sensor-type microcalorimeter is applied as the detector. A cryogen-free cooling system, which consists of a mechanical and a dilution refrigerator, is selected to achieve long-term temperature stability. In order to mount these detector and refrigerators on a TEM, the cooling system is specially designed such that these two refrigerators are separated. Also, the detector position and arrangement are carefully designed to avoid adverse affects between the superconductor detector and the TEM lens system. Using the developed EDS system, at present, an energy resolution of 21.92 eV full-width-at-half maximum has been achieved at the Cr Kα line. This value is about seven times better than that of the current typical commercial Si(Li) detector, which is usually around 140 eV. The developed microcalorimeter EDS system can measure a wide energy range, 1-20 keV, at one time with this high energy resolution that can resolve peaks from most of the elements. Although several further developments will be needed to enable practical use, highly accurate compositional analysis with high energy resolution will be realized by this microcalorimeter EDS system.

AB - A new energy dispersive X-ray spectrometer (EDS) with a mi- crocalorimeter detector equipped with a transmission electron microscope (TEM) has been developed for high- accuracy compositional analysis in the nanoscale. A superconducting transition-edge-sensor-type microcalorimeter is applied as the detector. A cryogen-free cooling system, which consists of a mechanical and a dilution refrigerator, is selected to achieve long-term temperature stability. In order to mount these detector and refrigerators on a TEM, the cooling system is specially designed such that these two refrigerators are separated. Also, the detector position and arrangement are carefully designed to avoid adverse affects between the superconductor detector and the TEM lens system. Using the developed EDS system, at present, an energy resolution of 21.92 eV full-width-at-half maximum has been achieved at the Cr Kα line. This value is about seven times better than that of the current typical commercial Si(Li) detector, which is usually around 140 eV. The developed microcalorimeter EDS system can measure a wide energy range, 1-20 keV, at one time with this high energy resolution that can resolve peaks from most of the elements. Although several further developments will be needed to enable practical use, highly accurate compositional analysis with high energy resolution will be realized by this microcalorimeter EDS system.

UR - http://www.scopus.com/inward/record.url?scp=76649092320&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=76649092320&partnerID=8YFLogxK

U2 - 10.1093/jmicro/dfp043

DO - 10.1093/jmicro/dfp043

M3 - Article

VL - 59

SP - 17

EP - 26

JO - Microscopy (Oxford, England)

JF - Microscopy (Oxford, England)

SN - 2050-5698

IS - 1

ER -