Microfabrication and drilling using diffraction-free pulsed laser beam generated with axicon lens

Masamichi Kohno, Yoshihiko Matsuoka

Research output: Contribution to journalArticle

23 Citations (Scopus)

Abstract

Laser microfabrication using a diffraction-free beam (Bessel beam) was performed. Microfabrication with a deep focal depth is possible because a diffraction-free beam has a main lobe with a small diameter, which does not depend on propagation length. The diffraction-free beam was generated using an axicon lens, and the generation was confirmed using an optical microscopy image of a laser-fabricated spot on a silicon wafer. Nevertheless using a nanosecond pulsed Nd:YAG laser, microfabrication with a spot diameter < 1 μm was realized. As a result of the deep focal depth of the diffraction-free beam, even if we change the work distance within a range of several millimeters, we are still able to maintain the diameter of the laser- fabricated spots to approximately 1 μm. Since an almost straight penetration hole with a diameter of 3 μm was drilled into SUS304 foil (20 μm thick), it was found that the diffraction-free beam has a high feasibility for the high-aspect-ratio laser drilling of an opaque material due to its deep focal depth.

Original languageEnglish
Pages (from-to)497-500
Number of pages4
JournalJSME International Journal, Series B: Fluids and Thermal Engineering
Volume47
Issue number3
DOIs
Publication statusPublished - Aug 1 2004
Externally publishedYes

Fingerprint

Microfabrication
Pulsed lasers
drilling
Laser beams
Lenses
pulsed lasers
Drilling
Diffraction
lenses
laser beams
Lasers
diffraction
laser drilling
lasers
Silicon wafers
Metal foil
Optical microscopy
Aspect ratio
high aspect ratio
lobes

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Fluid Flow and Transfer Processes
  • Physical and Theoretical Chemistry

Cite this

Microfabrication and drilling using diffraction-free pulsed laser beam generated with axicon lens. / Kohno, Masamichi; Matsuoka, Yoshihiko.

In: JSME International Journal, Series B: Fluids and Thermal Engineering, Vol. 47, No. 3, 01.08.2004, p. 497-500.

Research output: Contribution to journalArticle

@article{718688425e07411db980984c7ad4a110,
title = "Microfabrication and drilling using diffraction-free pulsed laser beam generated with axicon lens",
abstract = "Laser microfabrication using a diffraction-free beam (Bessel beam) was performed. Microfabrication with a deep focal depth is possible because a diffraction-free beam has a main lobe with a small diameter, which does not depend on propagation length. The diffraction-free beam was generated using an axicon lens, and the generation was confirmed using an optical microscopy image of a laser-fabricated spot on a silicon wafer. Nevertheless using a nanosecond pulsed Nd:YAG laser, microfabrication with a spot diameter < 1 μm was realized. As a result of the deep focal depth of the diffraction-free beam, even if we change the work distance within a range of several millimeters, we are still able to maintain the diameter of the laser- fabricated spots to approximately 1 μm. Since an almost straight penetration hole with a diameter of 3 μm was drilled into SUS304 foil (20 μm thick), it was found that the diffraction-free beam has a high feasibility for the high-aspect-ratio laser drilling of an opaque material due to its deep focal depth.",
author = "Masamichi Kohno and Yoshihiko Matsuoka",
year = "2004",
month = "8",
day = "1",
doi = "10.1299/jsmeb.47.497",
language = "English",
volume = "47",
pages = "497--500",
journal = "JSME International Journal, Series B: Fluids and Thermal Engineering",
issn = "1340-8054",
publisher = "Japan Society of Mechanical Engineers",
number = "3",

}

TY - JOUR

T1 - Microfabrication and drilling using diffraction-free pulsed laser beam generated with axicon lens

AU - Kohno, Masamichi

AU - Matsuoka, Yoshihiko

PY - 2004/8/1

Y1 - 2004/8/1

N2 - Laser microfabrication using a diffraction-free beam (Bessel beam) was performed. Microfabrication with a deep focal depth is possible because a diffraction-free beam has a main lobe with a small diameter, which does not depend on propagation length. The diffraction-free beam was generated using an axicon lens, and the generation was confirmed using an optical microscopy image of a laser-fabricated spot on a silicon wafer. Nevertheless using a nanosecond pulsed Nd:YAG laser, microfabrication with a spot diameter < 1 μm was realized. As a result of the deep focal depth of the diffraction-free beam, even if we change the work distance within a range of several millimeters, we are still able to maintain the diameter of the laser- fabricated spots to approximately 1 μm. Since an almost straight penetration hole with a diameter of 3 μm was drilled into SUS304 foil (20 μm thick), it was found that the diffraction-free beam has a high feasibility for the high-aspect-ratio laser drilling of an opaque material due to its deep focal depth.

AB - Laser microfabrication using a diffraction-free beam (Bessel beam) was performed. Microfabrication with a deep focal depth is possible because a diffraction-free beam has a main lobe with a small diameter, which does not depend on propagation length. The diffraction-free beam was generated using an axicon lens, and the generation was confirmed using an optical microscopy image of a laser-fabricated spot on a silicon wafer. Nevertheless using a nanosecond pulsed Nd:YAG laser, microfabrication with a spot diameter < 1 μm was realized. As a result of the deep focal depth of the diffraction-free beam, even if we change the work distance within a range of several millimeters, we are still able to maintain the diameter of the laser- fabricated spots to approximately 1 μm. Since an almost straight penetration hole with a diameter of 3 μm was drilled into SUS304 foil (20 μm thick), it was found that the diffraction-free beam has a high feasibility for the high-aspect-ratio laser drilling of an opaque material due to its deep focal depth.

UR - http://www.scopus.com/inward/record.url?scp=5444222802&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=5444222802&partnerID=8YFLogxK

U2 - 10.1299/jsmeb.47.497

DO - 10.1299/jsmeb.47.497

M3 - Article

AN - SCOPUS:5444222802

VL - 47

SP - 497

EP - 500

JO - JSME International Journal, Series B: Fluids and Thermal Engineering

JF - JSME International Journal, Series B: Fluids and Thermal Engineering

SN - 1340-8054

IS - 3

ER -