Microfabrication of wide-measurement-range load sensor using quartz crystal resonator

Yuichi Murozaki, Shinya Sakuma, Fumihito Arai

Research output: Contribution to journalConference articlepeer-review

5 Citations (Scopus)

Abstract

We successfully established a wafer level fabrication process of the quartz crystal resonator (QCR) load sensor using atomic diffusion bonding. The proposed sensor has three-layer structures; two Si-hold layers and a quartz layer. Using microfabrication and atomic diffusion bonding, the assembly process was simplified. The fabrication process enables further miniaturization of the QCR sensor due to the simplified assembling method. The fabricated sensor is easily integrated in the outer package and can be designed the measurement range. Finally, we succeeded in multi-biosignals (heartbeat, body motion) detection using fabricated QCR sensor and the outer case.

Original languageEnglish
Article number7051088
Pages (from-to)833-836
Number of pages4
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2015-February
Issue numberFebruary
DOIs
Publication statusPublished - Feb 26 2015
Externally publishedYes
Event2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal
Duration: Jan 18 2015Jan 22 2015

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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