Microgenerator using BiSbTe-Pt thermopile and Pt-Al 2O 3 ceramic combustor

W. Shin, T. Nakashima, M. Nishibori, T. Itoh, N. Izu, I. Matsubara, Y. Nakagawa, A. Yamamoto, H. Obara

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

The performance of a microcombustor thermoelectric generator device based on a thermopile using p-type Bi 0.3Sb 1.7Te 3 (BST) and n-type Pt films has been investigated. The BST films were prepared by two different methods-pulsed laser deposition (PLD) and sputter deposition-on Si 3N 4/SiO 2 multilayers on Si substrate. The ceramic catalyst combustor was patterned on the thermopile end on a thin membrane fabricated by back-side bulk etching of the silicon substrate. At 138°C the thermoelectric power factors of the PLD and sputter-deposited films were 3.6 × 10 -3 W/mK 2 and 0.22 × 10 -3 W/mK 2, respectively. The power from the generator with the sputter-deposited film was 0.343 μW, which was superior to that of the device with the PLD film, which provided 0.1 μW, for combustion of a 200 sccm flow of 3 v/v% hydrogen in air.

Original languageEnglish
Pages (from-to)817-822
Number of pages6
JournalJournal of Electronic Materials
Volume40
Issue number5
DOIs
Publication statusPublished - May 1 2011
Externally publishedYes

Fingerprint

Thermopiles
thermopiles
combustion chambers
Combustors
ceramics
Pulsed laser deposition
pulsed laser deposition
thermoelectric generators
Sputter deposition
Thermoelectric power
Silicon
Substrates
Hydrogen
Etching
Multilayers
generators
etching
membranes
Membranes
catalysts

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

Cite this

Microgenerator using BiSbTe-Pt thermopile and Pt-Al 2O 3 ceramic combustor. / Shin, W.; Nakashima, T.; Nishibori, M.; Itoh, T.; Izu, N.; Matsubara, I.; Nakagawa, Y.; Yamamoto, A.; Obara, H.

In: Journal of Electronic Materials, Vol. 40, No. 5, 01.05.2011, p. 817-822.

Research output: Contribution to journalArticle

Shin, W, Nakashima, T, Nishibori, M, Itoh, T, Izu, N, Matsubara, I, Nakagawa, Y, Yamamoto, A & Obara, H 2011, 'Microgenerator using BiSbTe-Pt thermopile and Pt-Al 2O 3 ceramic combustor', Journal of Electronic Materials, vol. 40, no. 5, pp. 817-822. https://doi.org/10.1007/s11664-011-1581-5
Shin, W. ; Nakashima, T. ; Nishibori, M. ; Itoh, T. ; Izu, N. ; Matsubara, I. ; Nakagawa, Y. ; Yamamoto, A. ; Obara, H. / Microgenerator using BiSbTe-Pt thermopile and Pt-Al 2O 3 ceramic combustor. In: Journal of Electronic Materials. 2011 ; Vol. 40, No. 5. pp. 817-822.
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