Microlens Fabricated by the Planar Process

Jun Ichi Shimada, Osamu Ohguchi, Renshi Sawada

Research output: Contribution to journalArticle

23 Citations (Scopus)

Abstract

A novel microlens is proposed that can be integrated on a laser-diode substrate by the planar process. A horizontal focusing lens, which is one component of this microlens, with a nearly diffraction-limited focusing spot is successfully fabricated. The relationship between fabrication errors and lens characteristics is quantitatively established by comparing lenses with various fabrication errors. Also, a laser diode integrated with the horizontal focusing lens is successfully fabricated without damage.

Original languageEnglish
Pages (from-to)571-576
Number of pages6
JournalJournal of Lightwave Technology
Volume9
Issue number5
DOIs
Publication statusPublished - Jan 1 1991
Externally publishedYes

Fingerprint

lenses
semiconductor lasers
fabrication
damage
diffraction

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics

Cite this

Microlens Fabricated by the Planar Process. / Shimada, Jun Ichi; Ohguchi, Osamu; Sawada, Renshi.

In: Journal of Lightwave Technology, Vol. 9, No. 5, 01.01.1991, p. 571-576.

Research output: Contribution to journalArticle

Shimada, JI, Ohguchi, O & Sawada, R 1991, 'Microlens Fabricated by the Planar Process', Journal of Lightwave Technology, vol. 9, no. 5, pp. 571-576. https://doi.org/10.1109/50.79532
Shimada, Jun Ichi ; Ohguchi, Osamu ; Sawada, Renshi. / Microlens Fabricated by the Planar Process. In: Journal of Lightwave Technology. 1991 ; Vol. 9, No. 5. pp. 571-576.
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