Micromachining of polydimethylsiloxane induced by laser plasma EUV light

S. Torii, T. Makimura, K. Okazaki, Daisuke Nakamura, Akihiko Takahashi, T. Okada, H. Niino, K. Murakami

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Mathematics

Engineering & Materials Science

Chemical Compounds

Physics & Astronomy