Micromachining of polydimethylsiloxane using EUV light

Shintaron Fukami, Shuichi Torii, Tetsuya Makimura, Kota Okazaki, Daisuke Nakamura, Akihiko Takahashi, Tatsuo Okada, Hiroyuki Niino, Koichi Murakami

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We studied the method to fabricate microstructures in PDMS sheet using laser-generated EUV light. In the high power density EUV light irradiation region, PDMS can be machined without chemical modification.

Original languageEnglish
Title of host publication2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013
DOIs
Publication statusPublished - Oct 18 2013
Event10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013 - Kyoto, Japan
Duration: Jun 30 2013Jul 4 2013

Publication series

NamePacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

Other

Other10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013
CountryJapan
CityKyoto
Period6/30/137/4/13

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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  • Cite this

    Fukami, S., Torii, S., Makimura, T., Okazaki, K., Nakamura, D., Takahashi, A., Okada, T., Niino, H., & Murakami, K. (2013). Micromachining of polydimethylsiloxane using EUV light. In 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013 [6600551] (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest). https://doi.org/10.1109/CLEOPR.2013.6600551