Micromachining of polydimethylsiloxane using EUV light

Shintaron Fukami, Shuichi Torii, Tetsuya Makimura, Kota Okazaki, Daisuke Nakamura, Akihiko Takahashi, Tatsuo Okada, Hiroyuki Niino, Koichi Murakami

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We studied the method to fabricate microstructures in PDMS sheet using laser-generated EUV light. In the high power density EUV light irradiation region, PDMS can be machined without chemical modification.

Original languageEnglish
Title of host publication2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013
DOIs
Publication statusPublished - Oct 18 2013
Event10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013 - Kyoto, Japan
Duration: Jun 30 2013Jul 4 2013

Publication series

NamePacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

Other

Other10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013
CountryJapan
CityKyoto
Period6/30/137/4/13

Fingerprint

Micromachining
Polydimethylsiloxane
micromachining
Chemical modification
radiant flux density
Irradiation
microstructure
Microstructure
irradiation
Lasers
lasers
baysilon

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Fukami, S., Torii, S., Makimura, T., Okazaki, K., Nakamura, D., Takahashi, A., ... Murakami, K. (2013). Micromachining of polydimethylsiloxane using EUV light. In 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013 [6600551] (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest). https://doi.org/10.1109/CLEOPR.2013.6600551

Micromachining of polydimethylsiloxane using EUV light. / Fukami, Shintaron; Torii, Shuichi; Makimura, Tetsuya; Okazaki, Kota; Nakamura, Daisuke; Takahashi, Akihiko; Okada, Tatsuo; Niino, Hiroyuki; Murakami, Koichi.

2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013. 2013. 6600551 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fukami, S, Torii, S, Makimura, T, Okazaki, K, Nakamura, D, Takahashi, A, Okada, T, Niino, H & Murakami, K 2013, Micromachining of polydimethylsiloxane using EUV light. in 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013., 6600551, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, 10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013, Kyoto, Japan, 6/30/13. https://doi.org/10.1109/CLEOPR.2013.6600551
Fukami S, Torii S, Makimura T, Okazaki K, Nakamura D, Takahashi A et al. Micromachining of polydimethylsiloxane using EUV light. In 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013. 2013. 6600551. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest). https://doi.org/10.1109/CLEOPR.2013.6600551
Fukami, Shintaron ; Torii, Shuichi ; Makimura, Tetsuya ; Okazaki, Kota ; Nakamura, Daisuke ; Takahashi, Akihiko ; Okada, Tatsuo ; Niino, Hiroyuki ; Murakami, Koichi. / Micromachining of polydimethylsiloxane using EUV light. 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013. 2013. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).
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