Micromachining of polydimethylsiloxane using EUV light

Shintaron Fukami, Shuichi Torii, Tetsuya Makimura, Kota Okazaki, Daisuke Nakamura, Akihiko Takahashi, Tatsuo Okada, Hiroyuki Niino, Koichi Murakami

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Engineering & Materials Science

Chemical Compounds

Physics & Astronomy