Micromachining of polymethylmethacrylate and polydimethylsiloxane using laser plasma soft X-rays

Shuichi Torii, Tetsuya Makimura, Kota Okazaki, Daisuke Nakamura, Akihiko Takahashi, Tatsuo Okada, Hiroyuki Niino, Kouichi Murakami

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

We have investigated micromachining of polymethylmetacrylate (PMMA) and polydimethylsil-ioxan (PDMS) by irradiation with laser plasma soft X-rays. We generated wide band soft X-rays around 10 nm by irradiation of Ta targets with Nd:YAG laser light. In addition, narrow band soft X-rays at 11 nm and 13.5 nm were generated by irradiation of solid Xe and Sn targets, respectively, with pulsed CO 2 laser light. The generated soft X-rays were focused on samples, using an ellipsoidal mirror. The soft X-rays were incident through windows of contact masks on the samples. We found that PMMA sheets were ablated by irradiation with soft X-rays at 13.5 nm. PDMS sheets are also ablated by soft X-ray irradiation at 1×10 8 W/cm 2, while PDMS surfaces were swelled by irradiation with soft X-rays at 3×10 6 W/cm 2. It is remarkable that through holes with a diameter of 1 μm can be fabricated in PMMA and PDMS sheets with a thickness of 4 μm. Thus, we have devel-oped a practical technique for micromachining of PMMA and PDMS sheets in a micrometer scale.

Original languageEnglish
Pages (from-to)235-238
Number of pages4
JournalJournal of Laser Micro Nanoengineering
Volume6
Issue number3
DOIs
Publication statusPublished - Dec 1 2011

Fingerprint

Micromachining
Polydimethylsiloxane
micromachining
laser plasmas
Plasmas
X rays
Lasers
Irradiation
irradiation
x rays
narrowband
YAG lasers
micrometers
Masks
Mirrors
masks
mirrors
broadband
lasers

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

Cite this

Micromachining of polymethylmethacrylate and polydimethylsiloxane using laser plasma soft X-rays. / Torii, Shuichi; Makimura, Tetsuya; Okazaki, Kota; Nakamura, Daisuke; Takahashi, Akihiko; Okada, Tatsuo; Niino, Hiroyuki; Murakami, Kouichi.

In: Journal of Laser Micro Nanoengineering, Vol. 6, No. 3, 01.12.2011, p. 235-238.

Research output: Contribution to journalArticle

Torii, Shuichi ; Makimura, Tetsuya ; Okazaki, Kota ; Nakamura, Daisuke ; Takahashi, Akihiko ; Okada, Tatsuo ; Niino, Hiroyuki ; Murakami, Kouichi. / Micromachining of polymethylmethacrylate and polydimethylsiloxane using laser plasma soft X-rays. In: Journal of Laser Micro Nanoengineering. 2011 ; Vol. 6, No. 3. pp. 235-238.
@article{f41fde14c38c4800906525b522e4fe54,
title = "Micromachining of polymethylmethacrylate and polydimethylsiloxane using laser plasma soft X-rays",
abstract = "We have investigated micromachining of polymethylmetacrylate (PMMA) and polydimethylsil-ioxan (PDMS) by irradiation with laser plasma soft X-rays. We generated wide band soft X-rays around 10 nm by irradiation of Ta targets with Nd:YAG laser light. In addition, narrow band soft X-rays at 11 nm and 13.5 nm were generated by irradiation of solid Xe and Sn targets, respectively, with pulsed CO 2 laser light. The generated soft X-rays were focused on samples, using an ellipsoidal mirror. The soft X-rays were incident through windows of contact masks on the samples. We found that PMMA sheets were ablated by irradiation with soft X-rays at 13.5 nm. PDMS sheets are also ablated by soft X-ray irradiation at 1×10 8 W/cm 2, while PDMS surfaces were swelled by irradiation with soft X-rays at 3×10 6 W/cm 2. It is remarkable that through holes with a diameter of 1 μm can be fabricated in PMMA and PDMS sheets with a thickness of 4 μm. Thus, we have devel-oped a practical technique for micromachining of PMMA and PDMS sheets in a micrometer scale.",
author = "Shuichi Torii and Tetsuya Makimura and Kota Okazaki and Daisuke Nakamura and Akihiko Takahashi and Tatsuo Okada and Hiroyuki Niino and Kouichi Murakami",
year = "2011",
month = "12",
day = "1",
doi = "10.2961/jlmn.2011.03.0012",
language = "English",
volume = "6",
pages = "235--238",
journal = "Journal of Laser Micro Nanoengineering",
issn = "1880-0688",
publisher = "Japan Laser Processing",
number = "3",

}

TY - JOUR

T1 - Micromachining of polymethylmethacrylate and polydimethylsiloxane using laser plasma soft X-rays

AU - Torii, Shuichi

AU - Makimura, Tetsuya

AU - Okazaki, Kota

AU - Nakamura, Daisuke

AU - Takahashi, Akihiko

AU - Okada, Tatsuo

AU - Niino, Hiroyuki

AU - Murakami, Kouichi

PY - 2011/12/1

Y1 - 2011/12/1

N2 - We have investigated micromachining of polymethylmetacrylate (PMMA) and polydimethylsil-ioxan (PDMS) by irradiation with laser plasma soft X-rays. We generated wide band soft X-rays around 10 nm by irradiation of Ta targets with Nd:YAG laser light. In addition, narrow band soft X-rays at 11 nm and 13.5 nm were generated by irradiation of solid Xe and Sn targets, respectively, with pulsed CO 2 laser light. The generated soft X-rays were focused on samples, using an ellipsoidal mirror. The soft X-rays were incident through windows of contact masks on the samples. We found that PMMA sheets were ablated by irradiation with soft X-rays at 13.5 nm. PDMS sheets are also ablated by soft X-ray irradiation at 1×10 8 W/cm 2, while PDMS surfaces were swelled by irradiation with soft X-rays at 3×10 6 W/cm 2. It is remarkable that through holes with a diameter of 1 μm can be fabricated in PMMA and PDMS sheets with a thickness of 4 μm. Thus, we have devel-oped a practical technique for micromachining of PMMA and PDMS sheets in a micrometer scale.

AB - We have investigated micromachining of polymethylmetacrylate (PMMA) and polydimethylsil-ioxan (PDMS) by irradiation with laser plasma soft X-rays. We generated wide band soft X-rays around 10 nm by irradiation of Ta targets with Nd:YAG laser light. In addition, narrow band soft X-rays at 11 nm and 13.5 nm were generated by irradiation of solid Xe and Sn targets, respectively, with pulsed CO 2 laser light. The generated soft X-rays were focused on samples, using an ellipsoidal mirror. The soft X-rays were incident through windows of contact masks on the samples. We found that PMMA sheets were ablated by irradiation with soft X-rays at 13.5 nm. PDMS sheets are also ablated by soft X-ray irradiation at 1×10 8 W/cm 2, while PDMS surfaces were swelled by irradiation with soft X-rays at 3×10 6 W/cm 2. It is remarkable that through holes with a diameter of 1 μm can be fabricated in PMMA and PDMS sheets with a thickness of 4 μm. Thus, we have devel-oped a practical technique for micromachining of PMMA and PDMS sheets in a micrometer scale.

UR - http://www.scopus.com/inward/record.url?scp=84861535196&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84861535196&partnerID=8YFLogxK

U2 - 10.2961/jlmn.2011.03.0012

DO - 10.2961/jlmn.2011.03.0012

M3 - Article

AN - SCOPUS:84861535196

VL - 6

SP - 235

EP - 238

JO - Journal of Laser Micro Nanoengineering

JF - Journal of Laser Micro Nanoengineering

SN - 1880-0688

IS - 3

ER -